超小尺寸硅基矩形滤波器  

Ultra-Compact Rectangle Filter Based on Silicon Substrate

作　　者：廖莎莎 樊星辰 刘真伟 Liao Shasha;Fan Xingchen;Liu Zhenwei(School of Communications and Information Engineering,Chongqing University of Posts and Telecommunications,Chongqing 400065,China)

机构地区：[1]重庆邮电大学通信与信息工程学院,重庆400065

出　　处：《光学学报》2024年第22期179-186,共8页Acta Optica Sinica

基　　金：重庆市教育委员会科学技术研究项目(KJQN202200613);国家自然科学基金区域创新发展联合基金(U22A2018)。

摘　　要：云计算、元宇宙等技术发展带来的超大规模数据处理对信号处理系统提出了新的要求。高矩形度的光子滤波器能有效实现信道划分,降低信号处理系统复杂度。提出了一种基于绝缘体上硅的超小尺寸矩形滤波器,该方案仅在单个微环谐振器中加入一个狭缝结构,就能实现矩形滤波谱线,尺寸仅为1200μm2,形状因子(20dB带宽与3dB带宽之比)可达3.13。分析了工艺误差对滤波器性能的影响,并提出改善方案。该滤波器具有尺寸超小、结构紧凑、制造简单、矩形度高等优势,可广泛应用于信号处理系统、宽带接入系统等领域。Objective Optical signal processing is widely used in modern communication systems due to its large bandwidth,low loss,and capability for easy parallel transmission.Rectangle filters,as key components in optical signal processing systems,have become a prominent research focus because they meet the requirements of wavelength division multiplexing systems and are well-suited for broadband access applications.Integrated rectangular filters typically use structures such as waveguide gratings(WGs),Mach-Zehnder interferometers(MZIs),and microring resonators(MRRs).Although these designs achieve good performance,they often suffer from drawbacks like large size and complex manufacturing processes.In this paper,we propose an ultra-compact,silicon-based rectangular filter with a high shape factor,which significantly advances the miniaturization of wavelength division multiplexing systems and enhances the performance of elastic optical networks,on-chip optical interconnects,and broadband access systems.Methods Our design utilizes silicon-on-insulator(SOI)technology,where the top silicon layer has a thickness of 220 nm and the buried oxide layer is 2μm thick.The waveguide is etched to a depth of 220 nm to form a strip waveguide,with an additional 2μm of SiO2 deposited on top(Fig.3).The filter consists of a single MRR with a slot fabricated in the resonator,also etched to a depth of 220 nm.By fine-tuning the slot’s length(ls)and width(ws),and the gaps(g1 and g2)between the ring and the straight waveguide,we create an ultra-small rectangle filter.To mitigate the effects of fabrication errors,we incorporate two micro-heaters in the coupling regions of the MRR.The filtering performance is significantly enhanced by adjusting the voltage applied to these heaters.Results and Discussions The gaps between the ring resonator and the input and output waveguides,denoted as g1 and g2 respectively,and the slot dimensions(length ls and width ws)within the ring resonator,are optimized using the finite difference time domain(FDTD)method.S

关 键 词：集成光学 矩形滤波器 光子集成电路 硅光子学 

分 类 号：TN256[电子电信—物理电子学]