基于NiFe材料多层复合薄膜GMI效应分析  

Analysis of GMI Effect in Multilayer Composite Films Based on NiFe Materials

作　　者：马宇航 王志广[1] 温涛 吕前程 周柯 金庆忍 刘明[1] MA Yuhang;WANG Zhiguang;WEN Tao;LYU Qiancheng;ZHOU Ke;JIN Qingren;LIU Ming(School of Electronic Science and Engineering,Xi’an Jiaotong University,Xi’an 710049,China;North Automatic Control Technology Institute,Taiyuan 030006,China;Southern Power Grid Digital Grid Research Institute Co.,Ltd.,Guangzhou 510300,China;Electric Power Research Institute of Guangxi Power Grid Co.,Ltd.,Nanning 530023,China)

机构地区：[1]西安交通大学电子科学与工程学院,陕西西安710049 [2]北方自动控制技术研究所,山西太原030006 [3]南方电网数字电网研究院股份有限公司,广东广州510300 [4]广西电网有限责任公司电力科学研究院,广西南宁530023

出　　处：《数字海洋与水下攻防》2024年第6期588-594,共7页Digital Ocean & Underwater Warfare

基　　金：国家重点研发项目“强磁场高电压设备运行状态非侵入式监测传感器及系统”(2022YFB3206800);国家自然科学基金“单芯片集成磁阻式三维磁场传感器中电流调控交换偏置机理与性能调控”(62371385)。

摘　　要：随着对海洋生态保护和资源开发需求不断增长,磁传感器在数字海洋的应用逐渐成为研究重点。通过光刻工艺和磁控溅射技术,制备了基于NiFe材料多层复合结构的GMI薄膜样品,并开发了高灵敏度的GMI传感器。为了测试样品的GMI效应,利用矢量网络分析仪搭建了实验测试平台,分析阻抗变化率随驱动频率和外加磁场的变化情况。结果表明:NiFe样品在纵向GMI效应下的阻抗变化率显著高于横向GMI效应,成功制备出灵敏度为13.5%/Oe的GMI薄膜器件。研制出微型化、高灵敏的GMI传感器,为数字海洋监测和安防的智能传感器网络提供了新的解决方案。As the demand for marine ecological protection and resource development continues to grow,the application of magnetic sensors in the digital ocean has become a research focus.In this paper,using photolithography and magnetron sputtering techniques,GMI thin film samples based on NiFe multilayer composite structures are fabricated,and high-sensitivity GMI sensors are developed.To test the GMI effect of the samples,an experimental test platform is set up using a vector network analyzer,and the impedance variation rate with driving frequency and applied magnetic field is analyzed.The results show that the impedance variation rate of the NiFe samples under the longitudinal GMI effect is significantly higher than that under the transverse GMI effect.Ultimately,GMI thin-film devices with a sensitivity of 13.5%/Oe are successfully developed.These micro-sized,higl-senstivity GMI sensors provide new solutions for applications in digital ocean monitoring and intelligent security sensor networks.

关 键 词：巨磁阻抗 磁传感器 磁灵敏度 

分 类 号：TM936[电气工程—电力电子与电力传动]