声表面波气体传感器研究进展  

Review of Surface Acoustic Wave-Based Gas Sensor

作　　者：崔柏乐 杨启明 王文[1,2] CUI Baile;YANG Qiming;WANG Wen(Institute of Acoustics,Chinese Academy of Sciences,Beijing 100190,China;University of Chinese Academy of Sciences,Beijing 100190,China)

机构地区：[1]中国科学院声学研究所,北京100190 [2]中国科学院大学,北京100190

出　　处：《压电与声光》2024年第6期827-839,共13页Piezoelectrics & Acoustooptics

基　　金：国家重点研发计划国际合作专项(2024YFE0199800)。

摘　　要：声表面波(SAW)气体传感器以其独特的微纳声学传感结构和力-声-电多物理场耦合传感机制,表现出高灵敏度、快速响应、宽量程及微型轻质等特点,逐渐成为广受人们关注的新兴气体传感技术之一。该文从SAW传播及传感理论出发,详细介绍敏感膜式与非敏感膜式SAW气体传感效应及机制、传感器件设计与制备、传感信号采集与处理等相关研究进展,探讨了SAW气体传感器在新能源、航空航天、国防、工业控制及智能制造等众多领域的潜在应用,最后对其发展趋势进行了展望。Surface acoustic wave(SAW)gas sensing technology has the characteristics of high sensitivity,fast response,miniaturization and lightweight because of its unique acoustic sensing structure and force-acoustic-electric physical field coupling sensing mechanism,which makes it gradually become one of the emerging gas sensing technologies that people pay close attention to.Based on the SAW propagation and sensing theory,this paper introduces in detail the research progress of SAW gas sensing effect and mechanism,sensor device design and preparation,sensor signal acquisition and processing,etc.Besides,the potential application of SAW gas sensors in many fields such as new energy,aerospace,national defense,industrial control and intelligent manufacturing and its development trend are discussed.

关 键 词：声表面波 气体传感 传感机理及效应 SAW传感器件 SAW气体传感应用 

分 类 号：TN384[电子电信—物理电子学] TN65