基于光纤法布里-珀罗干涉仪的超短薄膜腔的温度传感技术研究  

Research on Temperature Sensing Technology of Ultra-Short Thin Film Cavity Based on Fiber-Optic Fabry-Pérot Interferometer

作　　者：邢美华 杨迪 刘波 闫诚 刘钦朋 XING Meihua;YANG Di;LIU Bo;YAN Cheng;LIU Qinpeng(School of Science,Xi’an Shiyou University,Xi’an 710065,China;Shaanxi Engineering Research Center of Oil and Gas Resource Optical Fiber Detection,Xi’an 710065,China;Shaanxi Key Laboratory of Measurement and Control Technology for Oil and Gas Wells,Xi’an 710065,China;Key Laboratory of CNPC-Research Laboratory for Optical Fiber Dynamic Detection of Oil Reservoirs,Xi’an 710065,China)

机构地区：[1]西安石油大学理学院,陕西西安710065 [2]陕西省油气资源光纤探测工程技术研究中心,陕西西安710065 [3]陕西省油气井测控技术重点实验室,陕西西安710065 [4]CNPC重点实验室——油藏光纤动态监测研究室,陕西西安710065

出　　处：《压电与声光》2024年第6期1001-1006,1014,共7页Piezoelectrics & Acoustooptics

基　　金：陕西省自然科学基础研究计划项目(2024JC-YBMS-530);西安石油大学研究生创新与实践能力培养项目(YCS23213193)。

摘　　要：针对超短薄膜腔不易制造的问题,提出了一种利用液体形成超短薄膜腔的基于法布里-珀罗干涉仪(FPI)的超薄膜光纤温度传感器。通过优化材料结构、膜厚和腔长之间的关系,建立法布里-珀罗(FP)腔长极短的结构模型,研制小型化、增敏和高精度的光纤温度传感器,并进行实验验证。结果表明,该传感器的温度灵敏度为342.05 pm/℃,在40~120℃温度范围内的线性度为0.997,具有结构紧凑、制作简单、成本低等优点和良好的温度响应特性,在复杂环境中的温度检测和制作FP超短薄膜方面具有潜在的应用价值。To address the challenges in manufacturing ultrashort thin-film cavities,an ultrathin-film optical fiber temperature sensor based on a Fabry-Pérot interferometer(FPI)constructed using liquid adhesive is proposed.A miniature,high-sensitivity,and high-accuracy fiber-optic temperature sensor was developed and experimentally validated by optimizing the relationship between the material structure,film thickness,and cavity length.A structural model with an ultrashort Fabry-Pérot(FP)cavity length was successfully established.The experimental results reveal that the sensor has a temperature sensitivity of 342.05 pm/℃and a linearity of 0.997 within the temperature range of 40-120℃.The sensor features a compact design,simple fabrication process,low production cost,and excellent temperature-response performance.It holds promise for applications in temperature detection within complex environments and manufacture of ultrashort FP thin films.

关 键 词：光纤传感 光纤F-P腔 温度 灵敏度 

分 类 号：TN253[电子电信—物理电子学]