Piezoelectric Field Effect Transistors(Piezo-FETs)for Bionic MEMS Sensors:A Literature Review  

作　　者：Chang Ge Huawei Chen 

机构地区：[1]The Department of Electrical and Computer Engineering,The University of British Columbia,Vancouver,BC,V6T 1Z4,Canada [2]School of Mechanical Engineering and Automation,Beihang University,Beijing,100191,China

出　　处：《Journal of Bionic Engineering》2024年第6期2717-2729,共13页仿生工程学报(英文版)

摘　　要：This paper presents a literature review exploring the potential of piezoelectric field-effect transistors(piezo-FETs)as bionic microelectromechanical systems(MEMS).First,piezo-FETs are introduced as bionic counterparts to natural mechanoreceptors,highlighting their classic configuration and working principles.Then,this paper summarizes the existing research on piezo-FETs as sensors for pressure,inertial,and acoustic sensors.Material selections,design characteristics,and key performance metrics are reviewed to demonstrate the advantage of piezo-FETs over traditional piezoelectric sensors.After identifying the limitations in these existing studies,this paper proposes using bionic piezoelectric coupling structures in piezo-FETs to further enhance the sensing capabilities of these artificial mechanoreceptors.Experimentally validated manufacturing methods for the newly proposed piezo-FET structures are also reviewed,pointing out a novel,feasible,and impactful research direction on these bionic piezoelectric MEMS sensors.

关 键 词：Bionic MEMS Piezoelectric field-effect transistors Tactile sensor Multi-axis accelerometer Directional microphone 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]