112 Gbps CMOS-compatible waveguide germanium photodetector for the 2μm wavelength band with a 3.64 A/W response  

作　　者：YUPENG ZHU ZHI LIU ZHIPENG LIU YILING HU QINXING HUANG YAZHOU YANG XIANGQUAN LIU TAO MEN GUANGZE ZHANG JUN ZHENG YUHUA ZUO BUWEN CHENG 

机构地区：[1]Key Laboratory of Optoelectronic Materials and Devices,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China [2]Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China

出　　处：《Photonics Research》2024年第11期2633-2638,共6页光子学研究(英文版)

基　　金：National Key Research and Development Program of China(2022YFB2803100);National Natural Science Foundation of China(62090054,62250010,62274160);Youth Innovation Promotion Association of the Chinese Academy of Sciences(2021111);Strategic Leading Science and Technology Project,CAS(XDB43020100);China Computer Interconnect Technology Alliance(CCITA)Funding(20240104)。

摘　　要：The 2μm wavelength band emerges as a promising candidate for the next communication window to enhance the transmission capacity of data.A high-responsivity and high-speed photodetector operating at 2μm is crucial for the 2-μm-wavelength-band communication system.Here,we present an on-chip waveguide-coupled germanium photodetector with remarkably high responsivity and data-receiving rate,employing subbandgap light absorption and avalanche multiplication.The device is designed with an ingenious and simple asymmetric lateral p-i-n junction structure and fabricated through a standard CMOS process by a commercial factory.It has a responsivity of 3.64 A/W and a maximum bandwidth of 50 GHz at 2μm wavelength.For the first time,to the best of our knowledge,an optical receiving rate of up to 112 Gbps is demonstrated at 2μm,verifying its feasibility in a highspeed 2-μm-band communication system.To the best of our knowledge,the proposed device stands out as the fastest photodiode with the highest responsivity among all group III-V and group IV photodetectors working in the 2μm wavelength band.

关 键 词：2μm WAVEGUIDE communication 

分 类 号：TN3[电子电信—物理电子学]