SCARA型晶圆传输机器手结构设计与减振优化  

Structural Design and Vibration Reduction Optimization of SCARA Wafer Transfer Robot Hand

作　　者：李嘉俊 周海波[1,2] 徐云浪 余少强 Li Jiajun;Zhou Haibo;Xu Yunlang;Yu Shaoqiang(State Key Laboratory of Precision Manufacturing for Extreme Service Performance,Central South University,Changsha 410083,China;College of Mechanical and Electrical Engineering,Central South University,Changsha 410083,China)

机构地区：[1]中南大学极端服役性能精准制造全国重点实验室,长沙410083 [2]中南大学机电工程学院,长沙410083

出　　处：《动力学与控制学报》2024年第12期70-78,共9页Journal of Dynamics and Control

基　　金：湖南省科技创新计划项目(2021JC0005)。

摘　　要：晶圆传输机器手是晶圆在搬运过程中实现高精度和高效率自动化的重要组成设备.工作过程中其结构模态固有频率直接影响了晶圆传输中运动控制过程中的精度和稳定性,基于平面3关节直驱旋转运动和垂直升降运动原理,设计了一款SCARA(Selective Compliance Assembly Robot Arm)型四自由度晶圆传输机器手.首先,采用Ansys Workbench软件对SCARA型晶圆传输机器手的超薄机械手指进行了模态分析,采用均匀轮形筋结构对手指进行了结构尺寸优化,优化后的一阶模态提高了42.79%;然后,采用Ansys Workbench对晶圆传输的整体结构进行了优化,研究发现底座部分刚度较弱,是造成机器手整体低阶模态频率较低的主要原因,对此特别针对底座进行了结构优化,优化后的一阶和二阶模态频率分别提高了52.03%和30.55%.通过结构优化,提高了晶圆传输机器手的整体低阶模态频率,改善了晶圆传输机器手的运动控制过程中的精度和稳定性,避免了共振,进而降低了振动的影响,有效保证了晶圆传输机器手在实际工作中的稳定性和可靠性.Wafer transfer robot hand is an important component equipment to realize high precision and high efficiency automation in the process of wafer handling.The structural natural frequency directly affects the motion control performance of wafer transmission during operation.Based on the principle of planar 3-joint direct drive rotation motion and vertical lift motion,a SCARA(Selective Compliance Assembly Robot Arm)four-degree-of-freedom wafer transfer robot hand is designed.Firstly,the modal analysis of the ultra-thin mechanical finger of the SCARA wafer transfer robot hand is carried out by Ansys Workbench software.The structural size of the finger is optimized by using the uniform wheel rib structure,and the optimized first-order mode is increased by 42.79%.Then,Ansys Workbench is used to optimize the overall structure of wafer transmission.It is found that the stiffness of the base part is weak,which is the main reason for the low-order mode of the whole robot hand.For this,the structure optimization is carried out for the base,and the optimized first-order and second-order modal frequencies are increased by 52.03%and 30.55%respectively.Through structural optimization,the overall low-order mode of the wafer transfer robot hand is improved,and the accuracy and stability of the motion control process of the wafer transfer robot hand are improved,thereby reducing the possibility of resonance and avoiding resonance,and effectively ensuring the stability and reliability of the wafer transfer robot hand in actual work.

关 键 词：晶圆传输机器手 模态分析 共振 结构优化 

分 类 号：TP241.2[自动化与计算机技术—检测技术与自动化装置]