基于稳定域性能优化的精密温控回路自整定方法  

Precision Temperature Control Loop Self-Tuning Method Based on Stability Region Performance Optimization

作　　者：文国军[1] 杨自强 董河 Wen Guojun;Yang Ziqiang;Dong He(School of Mechanical and Electronic Information,China University of Geosciences(Wuhan),Wuhan 430074,China)

机构地区：[1]中国地质大学(武汉)机械与电子信息学院,武汉430074

出　　处：《动力学与控制学报》2024年第12期79-86,共8页Journal of Dynamics and Control

摘　　要：精密温控系统在半导体制造中对于维持环境温度的稳定性至关重要.然而,由于系统具有时滞、非线性和大惯性等特性,确定最优控制参数变得困难.此外,当系统状态发生变化时,控制参数需要重新整定以适应新的工况.现有的控制器参数整定方法主要分为工程整定法和优化算法.前者简单易用、计算便捷,但仅适用于控制精度要求较低的场景,且依赖于操作人员的经验,需多次反复调节,耗时耗力.后者虽然在参数寻优效率和控制精度方面表现较好,但难以保证系统稳定性,且存在陷入局部最优的风险.针对上述问题,本文提出了一种基于稳定域性能指标的控制器参数自整定方法.该方法首先通过模型辨识获取系统模型,在此基础上应用稳定边界轨迹法确定控制器参数稳定域.为评价系统的设定值跟踪能力和抗扰动性能,提出了相应的性能指标.对稳定域划分网格,计算网格点参数对应的性能指标,确保整定结果为全局最优.此外,本方法使用实际系统数据作为模型扰动输入进行性能评估,使整定结果更具可靠性.实验验证表明,与人工调参相比,基于本文方法得到的控制器参数在系统控制精度上具有显著优势.Precision temperature control systems are critical in semiconductor manufacturing to maintain the stability of the ambient temperature.However,determining the optimal control parameters becomes difficult due to the characteristics of the system such as time lag,nonlinearity and large inertia.In addition,when the system state changes,the control parameters need to be recalibrated to adapt to the new operating conditions.The existing controller parameter tuning methods are mainly divided into engineering tuning method and optimization algorithm.The former is easy to use and convenient to calculate,but it is only applicable to the scenarios with low control accuracy requirements,and it depends on the experience of the operator,which is time-consuming and labor-intensive as it needs to be adjusted repeatedly.Although the latter performs better in terms of parameter optimization efficiency and control accuracy,it is difficult to ensure the stability of the system,and there is a risk of falling into the local optimum.Aiming at the above problems,this paper proposes a controller parameter self-tuning method based on stability region performance optimization.The method firstly obtains the system model through model identification,and then applies the stability region locus method to determine the stability region of the controller parameters on this basis.In order to evaluate the set value tracking ability and disturbance resistance of the system,corresponding performance indexes are proposed.The stability region is divided into grids and the performance indexes corresponding to the grid point parameters are calculated to ensure that the calibration results are globally optimal.In addition,this method uses actual system data as model perturbation inputs for performance evaluation,which makes the tuning results more reliable.Experimental validation shows that the controller parameters obtained based on the method of this paper have significant advantages in system control accuracy compared with manual parameter tuning.

关 键 词：精密温控 稳定域 控制器 参数自整定 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]