玉米状ZnO二级纳米阵列结构的合成及其SO 2气敏特性研究  

Preparation of Corn Like ZnO Secondary Nanoarray for High Response and Fast Detection of SO_(2)

作　　者：曹磊[1,2] 李森林 张传涛 南宁 于灵敏[1] CAO Lei;LI Senlin;ZHANG Chuantao;NAN Ning;YU Lingmin(School of Materials and Chemical Engineering,Xi’an Technology University,Xi’an 710021,China;School of Science,Xi’an Technology University,Xi’an 710021,China)

机构地区：[1]西安工业大学材料与化工学院,西安710021 [2]西安工业大学基础学院,西安710021

出　　处：《西安工业大学学报》2025年第1期35-42,共8页Journal of Xi’an Technological University

基　　金：国家自然科学基金项目(62171359);宁夏回族自治区自然科学基金项目(2024AAC02038)。

摘　　要：为了提高ZnO纳米阵列薄膜材料对SO_(2)气体的气敏特性,并进一步探讨薄膜材料表面结构与性能之间的关系,本文采用化学溶液法在Ag-pd叉指电极基底上原位定向生长了玉米状ZnO二级纳米阵列薄膜材料。表征结果显示,在ZnO纳米棒阵列表面形成了丰富的玉米颗粒状的二级纳米结构,这种结构具有较高的结晶度且富含氧空位。SO_(2)气敏特性结果显示,在最佳工作温度200℃,该结构对10 ppm SO_(2)的气敏响应值高达9.2,是一级纳米棒阵列性能的5.7倍。响应恢复时间缩短了6 s~64 s。因此,基于玉米状ZnO二级纳米阵列结构的传感器具有巨大的SO_(2)检测潜力,有望成为一种高性能SO_(2)气敏传感材料。The study aims to improve the sensitivity of ZnO nanoarray thin film materials to SO_(2)gas and further explore the relationship between the surface structure and properties of thin film materials.Corn like ZnO secondary nanoarray thin film materials grew on Ag Pd interdigitated electrodes using the chemical solution method and in situ growth approach.The characterization results show that on the surface of ZnO nanorod arrays form secondary nanostructures in the form of corn particles,which are high in crystallinity and rich in oxygen vacancies.Their SO_(2)gas sensing characteristics show that at the optimal working temperature of 200℃,the gas sensing response value of this structure to 10 ppm SO_(2)is as high as 9.2,which is 5.7 times that of the first order nanorod array.The response recovery time is shortened by 6 s~64 s.It is concluded that the sensors based on corn like ZnO secondary nanoarray structure have great potential for the detection of SO_(2)gas and are expected to become high performance SO_(2)gas sensors.

关 键 词：玉米状 二级结构 纳米阵列 SO 2 

分 类 号：TB3[一般工业技术—材料科学与工程]