基于巨磁阻抗效应的双模态型低噪声大量程磁传感器  

Dual-mode low noise large range magnetic sensor based on giant magnetoimpedance effect

作　　者：温涛 马宇航 王德全 谌浩然 李艳芳 许洋[1] 王志广[2] WEN Tao;MA Yuhang;WANG Dequan;CHEN Haoran;LI Yanfang;XU Yang;WANG Zhiguang(North Automatic Control Technology Institute,Taiyuan 030006,China;School of Electronic Science and Engineering,Xi’an Jiaotong University,Xi’an 710049,China;Yangtze Optical Electronic Co.,Ltd.,Wuhan 430071,China;School of Communication Engineering,Hangzhou Dianzi University,Hangzhou 310000,China)

机构地区：[1]北方自动控制技术研究所,太原030006 [2]西安交通大学电子科学与工程学院,西安710049 [3]武汉长盈通光电技术股份有限公司,武汉430071 [4]杭州电子科技大学通信工程学院,杭州310000

出　　处：《物理学报》2025年第3期211-221,共11页Acta Physica Sinica

基　　金：国家重点研发计划(批准号:2022YFB3206800);国家自然科学基金(批准号:62371385)资助的课题。

摘　　要：磁传感器在导航、交通运输、机器人、自动化、医疗设备等领域有着广泛的应用,对传感器的性能要求越来越高.本文提出了一种具有两种工作模式的磁传感器,兼具大量程和低噪声两种优点.该传感器由一个640μH磁芯绕线电感与一个100 pF电容串联构成.传感器工作于阻抗模式时,具有噪声低的优点,当传感器驱动信号频率为1 MHz,偏置磁场为7.66 Oe(1 Oe=10^(3)/(4π)A/m)时,传感器等效磁噪声水平最小,约为200 pT/(Hz)1/2@1 Hz,线性范围为2 Oe;工作于频率模式时,具有量程大的优点,量程可以达到25 Oe,当偏置磁场为7.66 Oe时,传感器灵敏度最大,约为47 kHz/Oe.该传感器与多种型号的商用磁传感器相比,其低噪声、大量程、低成本的优点依然具有显著的市场竞争力.Magnetic sensors are widely used in the fields of navigation, transportation, robotics, automation, and medical equipment, and the performance requirements of sensors are getting higher and higher. In this work, a bimodal magnetic sensor with two operating modes, which has the advantages of large range and low noise, is proposed. The sensor consists of a 640 μH core-wound inductor in series with a 100 pF capacitor. When the external magnetic field changes, the magnetization state of the iron core in the inductor will change, the inductance value will change accordingly. The resonant frequency and impedance value of the sensor will also change with the magnetic field. In this work, the giant magnetic impedance characteristics of an RLC series circuit are analyzed, and the relationship between magnetic permeability, inductance value, and external magnetic field is established, and the series resonant frequency of the circuit is simulated to calculate the characteristics of the circuit with respect to the inductance variation. Then, two testing systems are set up to test the relationship between resonance frequency and magnetic field, as well as the noise characteristics of the sensor. In the impedance mode, the effects of capacitance, drive signal frequency, and static bias magnetic field on the sensor noise floor are first analyzed to determine the optimal parameters of the sensor. When the series capacitance of the sensor is 100 pF, the drive signal frequency will be 1 MHz and the static bias magnetic field will be 7.66 Oe. The sensor has the optimal performance with an equivalent noise floor of about 200pT/√(Hz)@1Hz, an impedance rate of change sensitivity of 160.6%/Oe, and a linear range of about 2 Oe. In the frequency mode, the sensor operates linearly up to 25 Oe. A logistic regression model is used to fit the resonant frequency to the magnetic field variation, and the fitted value reaches 0.9974. When the static bias magnetic field is about 7.66 Oe, the sensor sensitivity will be about 47 kHz/Oe. Moreover

关 键 词：磁传感器 双模态 低噪声 大量程 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]