亚波长金属槽阵列吸收增强研究  

Study on absorption enhancement of sub-wavelength metal groove array

作　　者：窦俪馨 张斯文[1] DOU Lixin;ZHANG Siwen(College of Science,Tianjin University of Technology,Tianjin 300384,China)

机构地区：[1]天津理工大学理学院,天津300384

出　　处：《天津理工大学学报》2025年第1期134-139,共6页Journal of Tianjin University of Technology

基　　金：国家自然科学基金(61605144);天津市自然科学基金(14JCQNJC1900);天津理工大学教学基金(YB22-32,YBXM2219)。

摘　　要：文中采用严格数值分析方法系统研究了亚波长金属槽阵列的吸收增强效应。针对单层、双层矩形槽阵列特点,数值模拟了结构参数和金属类型对阵列吸收效率的影响。研究结果表明,亚波长金属矩形槽阵列的吸收增强现象主要来自槽内局域模式共振效应,且窄槽的共振更强,吸收效率更高。满足共振效应时与单层结构相比,双层矩形槽阵列上层槽宽是调控吸收峰增强效应的主导参数,下层槽宽对吸收峰数值影响很小,仅调控下层槽共振深度。文中对双层结构的分析为算法对V型槽、梯形槽的吸收增强设计提供了数值模拟参考,保障吸收增强的同时有效降低加工难度,也为以亚波长金属槽阵列为吸收增强单元的器件设计提供了重要参数指导。In this paper,the absorption enhancement of sub-wavelength metal groove array is systematically studied by rigorous numerical analysis.According to the characteristics of single-layer and double-layer rectangular groove arrays,the effects of structural parameters and metal type on absorption efficiency of the array are numerically simulated.The study results show that the absorption enhancement of the sub-wavelength metal groove array mainly comes from the local mode resonance in grooves.Large absorption efficiency for narrow grooves with strong resonance can be obtained.Compared with a single-layer groove array,the absorption enhancement of double-layer groove array mainly depends on the upper-layer-width under resonance condition,and weekly depends on the lower-layer width which deeply affects the resonance depth for lower layer grooves.Results of double-layer groove array in this paper provide numerical simulation references for the algorithm in further studying of absorption enhancement by V-shaped grooves,trapezoidal grooves and so on,which can obtain giant absorption enhancement with lower fabrication difficulty.Our study can also provide important parameter guidance for the device design with the sub-wavelength groove array in metallic substrate as the absorption enhancement unit.

关 键 词：严格耦合波分析 亚波长金属矩形槽阵列 Fabry-Perot共振 吸收增强 

分 类 号：O436[机械工程—光学工程]