电子级氩气中痕量气相杂质的快速检测方法  

Rapid detection method for trace impurities in electronic-grade argon

作　　者：高艳秋[1] 魏王慧 薛民杰[1] 于瑞祥[1] 任逸尘 Gao Yanqiu;Wei Wanghui;Xue Minjie;Yu Ruixiang;Ren Yichen(Shanghai Institute of Measurement and Testing Technology)

机构地区：[1]上海市计量测试技术研究院

出　　处：《上海计量测试》2024年第6期24-29,共6页Shanghai Measurement and Testing

基　　金：上海市市场监督管理局科技计划项目(2022-15)。

摘　　要：提出了一种能够快速检测电子级氩气中痕量杂质的检测方法,并与其他检测方法进行了比较。该方法采用气相色谱仪搭载基于氩辉光放电技术的氩放电检测器对杂质组分进行检测,而通过由多通阀与色谱柱等组成的反吹气路系统,可实现不同杂质组分间的完全分离,并可有效解决样品气中水分对测量的干扰问题。使用该方法,通过一键进样操作,即可在8 min内完成对电子级氩气中六种痕量杂质的快速准确定量,且各组分的检测限均在0.05×10^(-6)(V/V)以下,可以满足电子级氩气的检测需求。A rapid detection method for trace impurities in electronicgrade argon is proposed in this article,and compared with other detection methods.This method determine trace impurity withthegas chromatograph which equip the argon discharge detectorbase on argon glow discharge technologyThe gas system consisting of multi-way valves and chromatographic column used to perform the complete separation of various impurities through back-flushing technology,and effectively avoid the interference to the detection from moisture in the sample gas.Through this detection method,six kinds of impurities in electronic-grade argon canbe rapidly quantitatively analyzed in only 8 minutes through one-click sample injection operationwith less than 0.05×10^(-6)(V/V)detection limits,which can meet the analysis requirement of electronic-grade argon.

关 键 词：电子级氩气 痕量杂质 氩辉光放电 气相色谱法 反吹 

分 类 号：O65[理学—分析化学]