光纤FPI高温压力传感器的设计与仿真  

Design and Simulation of Fiber Optic FPI High Temperature Pressure Sensor

作　　者：田野[1] 曹咏弘[1] 吕晶 Tian Ye;Cao Yonghong;LüJing(School of Aerospace Engineering,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学航空宇航学院,太原030051

出　　处：《微纳电子技术》2025年第2期105-115,共11页Micronanoelectronic Technology

摘　　要：航空发动机的内部环境严苛,为保证发动机正常运行需要实时监测压气室、燃烧室等关键部位的动态压力信号和温度信号。基于法布里珀罗干涉原理,以蓝宝石作为材料,建立了传感器整体结构模型并级联光栅结构作为温度补偿,通过理论和仿真分析确定了传感器具体结构尺寸参数。利用有限元分析软件ANSYS对蓝宝石法布里珀罗干涉仪(FPI)光纤高温压力传感器模型进行了静态分析及温度/压力耦合分析,以模拟传感器在复合环境下的性能。传感器的压力灵敏度为2.216 2 nm/MPa,温度灵敏度为9.198 4 pm/℃,交叉灵敏度为0.017 1 MPa/℃,满量程精度为0.735%,在26~1 500℃范围内具有良好的热-机械性能,为今后蓝宝石高温压力传感器结构的优化与改进提供了一定的参考。The internal environment of an aero-engine is highly demanding,thus it is essential to monitor the dynamic pressure signal and temperature signal of key components such as the pressure chamber and combustion chamber in real time to guarantee the normal operation of the engine.Based on the principle of Fabry-Pérot interference,the overall structure model of the sensor was established using sapphire as the material and the cascaded grating structure for temperature compensation.The specific structural and dimensional parameters of the sensor were determined through theoretical and simulation analysis.The static analysis and temperature/pressure coupling analysis of the sapphire Fabry-Pérot interferometer(FPI)fiber high-temperature pressure sensor were conducted using ANSYS finite element analysis software to simulate its performance in composite environments.The pressure sensitivity of the sensor is 2.2162 nm/MPa,the temperature sensitivity is 9.1984 pm/℃,the cross sensitivity is 0.0171 MPa/℃,the full-range accuracy is 0.735%.It exhibits excellent thermal mechanical properties within the temperature range of 26-1500℃.This study provides some references for future optimization and enhancement of structure of sapphire high temperature pressure sensors.

关 键 词：光纤高温压力传感器 法布里珀罗干涉仪(FPI) 光栅 蓝宝石薄膜 微电子机械系统(MEMS) 

分 类 号：TN253[电子电信—物理电子学] TP212[自动化与计算机技术—检测技术与自动化装置]