基于PVDF压电薄膜的柔性高g值加速度传感器  

A Flexible High-g Accelerometer Sensor Based on PVDF Piezoelectric Film

作　　者：杨晓鹏 范志强[1] 臧清高 马万里 Yang Xiaopeng;Fan Zhiqiang;Zang Qinggao;Ma Wanli(School of Aeronautics and Astronautics,North University of China,Taiyuan 030051,China;School of Environment and Safety Engineering,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学航空宇航学院,太原030051 [2]中北大学环境与安全工程学院,太原030051

出　　处：《微纳电子技术》2025年第2期150-158,共9页Micronanoelectronic Technology

基　　金：山西省基础研究计划(202403021211157);山西省高校青年学术带头人项目(2024Q023);省部共建动态测试技术国家重点实验室开放研究基金(2022-SYSJJ-06)。

摘　　要：穿透引爆装置是武具控制系统中的核心部件,它能够测量火工品在穿透过程中的加速度过载。然而,传统的加速度传感器与引爆装置间一般选用刚性连接,这会造成高频振荡的传播,导致过载脉冲信号粘连、失准。基于聚偏二氟乙烯(PVDF)压电薄膜,通过非对称阻尼层、周边固支的微结构设计了一种新型柔性加速度传感器,该传感器结构可以通过树脂柔性封装在引爆装置中,有效降低高频振荡干扰。利用LS-DYNA数值模拟和实验验证了预应力垫块的装配效果,其有效降低了柔性传感器在高g值测试过程中的局部振动。通过自由式霍普金森杆,开展了不同幅值的过载激励测试,测试结果表明:该柔性加速度传感器灵敏度系数为(0.177±0.005)pC/g,稳定性良好,测试精度较高。研究工作为加速度测量提供了一种新思路,在穿透引爆装置的柔性集成封装领域具有广阔的应用潜力。The penetration detonation device is a core component of weapon control systems,capable of measuring the acceleration overload of a pyrotechnics during penetration.However,traditional accelerometer sensors are typically rigidly connected to detonation devices,which can transmit high-frequency oscillations,leading to signal overlap and inaccuracy in overload pulse measurements.Based on polyvinylidene fluoride(PVDF)piezoelectric film,a novel flexible accelerometer sensor was designed using an asymmetric damping layer and a microstructure with peripheral fixed support.This sensor can be flexibly packaged within the detonation device using resin,effectively reducing high-frequency oscillation interference.LS-DYNA numerical simulations and experiments verify the assembly effectiveness of pre-stressed spacers,which significantly reduces local vibrations of the flexible sensor during high-g testing.Overload excitation tests of varying amplitudes were conducted using a free Hopkinson bar.The results demonstrate that the flexible accelerometer sensor has a sensitivity coefficient of(0.177±0.005)pC/g,with good stability and high measurement accuracy.This study provides a new idea to acceleration measurement and has broad application potential in the flexible integrated packaging of penetration detonation devices.

关 键 词：穿透引爆装置 高g值加速度传感器 聚偏二氟乙烯(PVDF) 柔性过载测试 预应力 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]