小型化全固态方波Marx发生器的研究  

Study of a miniaturized solid-state Marx generator

作　　者：李孜 马睿一 饶俊峰 姜松 Li Zi;Ma Ruiyi;Rao Junfeng;Jiang Song(School of Mechanical Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China;Suzhou Institute of Biomedical Engineering and Technology,Chinese Academy of Sciences,Suzhou 215163,China)

机构地区：[1]上海理工大学机械工程学院,上海200093 [2]中国科学院苏州生物医学工程与技术学院,江苏苏州215163

出　　处：《强激光与粒子束》2025年第2期130-135,共6页High Power Laser and Particle Beams

基　　金：国家自然科学基金项目(12205192);姑苏青年领军人才项目(ZXL2023210)。

摘　　要：提出了一种带有新型磁隔离驱动电路的小型化全固态方波Marx发生器。小型化全固态方波Marx发生器的主电路基于半桥结构,将相邻级的充电开关和放电开关的源极短接,与串芯磁环磁隔离驱动方法相结合,只需一个来自初级侧的双极性信号就能同步驱动Marx发生器中的所有开关,从而大大减少了驱动电路中所需的元件数量。搭建了14级实验样机,电源总质量仅为314 g,宽15 cm、长8 cm、高5 cm。在电阻负载上获得了峰值电压为10 kV、最大重复频率为10 kHz、脉冲宽度为200 ns~5μs的高压方波脉冲。利用样机产生的500 ns、10 kV、1 kHz的方波脉冲驱动了介质阻挡放电负载,产生了均匀且强烈的放电,表明该小型化Marx发生器适合驱动介质阻挡放电负载、用作低温等离子体源。Many applications including plasma excitation and high-power microwave sources require miniaturized high-voltage pulse generators.A miniaturized Marx generator with a novel magnetic isolated drive circuit is proposed.Making the source terminals of the charging MOSFET and discharging MOSFET in adjacent stages shorted in Marx generators based on half-bridge circuits,we apply a bipolar signal to both gates of these two MOSFETs and control both their switching.Combined with magnetic isolated driver with primary windings in series,only one bipolar signal from the primary side can synchronously drive all switches in the Marx generator,which considerably reduces the number of required components in the drive circuits.A 14-level experimental prototype was built,with a total weight of only 314 g,a width of 15 cm,a length of 8 cm,and a height of 5 cm.High-voltage square wave pulses with a peak voltage of 10 kV,a repetition frequency of 10 kHz,and a pulse width ranging from 200 ns to 5μs were obtained over a resistive load.The 500 ns,10 kV,and 1 kHz square wave pulses generated by the prototype were used to drive the dielectric barrier discharge load,and a uniform and strong discharge was generated,indicating that the miniaturized Marx generator is suitable for driving the dielectric barrier discharge load and being used as a low-temperature plasma source.

关 键 词：脉冲发生器 MARX发生器 小型化 方波脉冲 低温等离子体 

分 类 号：TM832[电气工程—高电压与绝缘技术]