CVD Al_(2)O_(3)涂层织构取向对显微组织结构和性能的影响  

Influence of Texture Orientation of CVD Al_(2)O_(3) Coating on Microstructure and Properties

作　　者：瞿峻 陈响明[1,2] 王社权 温光华[1,2] 刘萍 罗学全[1,2] 李思敏 Qu Jun;Chen Xiangming;Wang Shequan;Wen Guanghua;Liu Ping;Luo Xuequan;Li Simin(Zhuzhou Cemented Carbide Cutting Tools Co,Ltd.,Zhuzhou Hunan 412000,China;State Key Laboratory of Cemented Carbide,Zhuzhou Hunan 412000,China)

机构地区：[1]株洲钻石切削刀具股份有限公司,湖南株洲412000 [2]硬质合金国家重点实验室,湖南株洲412000

出　　处：《硬质合金》2024年第6期506-514,共9页Cemented Carbides

摘　　要：化学气相沉积(CVD)Al_(2)O_(3)涂层具备高硬度,良好韧性,优异的耐磨、耐热、抗氧化、化学稳定等性能,是一种综合性能优良的切削刀具涂层材料。本文采用CVD制备了具有(104)、(0012)及(012)织构取向α-Al_(2)O_(3)的MT-Ti CN/Al_(2)O_(3)/Ti N涂层。采用XRD、SEM等研究了涂层显微组织结构、织构取向及涂层性能。实验结果表明,高(0012)织构取向α-Al_(2)O_(3)涂层柱状晶晶粒更完整;α-Al_(2)O_(3)涂层织构取向会影响表层Ti N形貌及织构取向,高(0012)织构取向α-Al_(2)O_(3)表层Ti N为高(111)织构取向,(104)织构取向α-Al_(2)O_(3)表层Ti N为弱(111)+(331)混合织构取向,(012)织构取向α-Al_(2)O_(3)表层Ti N为弱(220)+(420)混合织构取向。车削42Cr Mo实验结果表明,高(0012)织构取向α-Al_(2)O_(3)涂层耐磨性能优于(104)和(012)织构取向,主要表现在高(0012)织构取向α-Al_(2)O_(3)涂层前刀面和后刀面抗磨损能力均更优。The chemical vapor deposition(CVD)Al_(2)O_(3) coating possesses high hardness,good toughness,as well as excellent wear resistance,heat resistance,oxidation resistance,and chemical stability.It is a cutting tool coating material with excellent comprehensive properties.In this paper,the MT-TiCN/Al_(2)O_(3)/TiN coatings with(104),(0012),and(012)texture orientations ofα-Al_(2)O_(3) were prepared by CVD.The microstructures,texture orientations,and coating properties were studied by using X-ray diffraction(XRD)and scanning electron microscope(SEM).The experimental results show that the columnar grains of theα-Al_(2)O_(3) coating with high(0012)texture orientation are more complete.The texture orientation of theα-Al_(2)O_(3) coating will affect the morphology and texture orientation of the surface TiN.The surface TiN of theα-Al_(2)O_(3) coating with a high (0012) texture orientation exhibits a high (111) texture orientation. The surface TiN of the α - Al_(2)O_(3)coating with a (104) texture orientation shows a weak (111) + (331) mixed texture orientation. The surface TiN of the α-Al_(2)O_(3)coating with a (012) texture orientation presents a weak (220) + (420) mixed texture orientation. The results of the cuttingexperiment on 42CrMo indicate that the wear resistance of the α - Al_(2)O_(3) coating with a high (0012) texture orientation issuperior to that of the coatings with (104) and (012) texture orientations, mainly manifested in that both the rake face andthe flank face of the α-Al_(2)O_(3) coating with a high (0012) texture orientation have better wear resistance.

关 键 词：CVD涂层 α-Al_(2)O_(3) 织构取向 显微组织 切削性能 

分 类 号：TG1[金属学及工艺—金属学]