Feasibility Study on Magnetorheological Finishing of Thin Copper Substrate  

作　　者：Bo Pan Renke Kang Yunfei Zhang Kailong Li Dongxing Du Xiaoguang Guo Chao Wang Jiang Guo Xianglong Zhu Wen Huang 

机构地区：[1]Key Laboratory for Precision and Non‑Traditional Machining Technology of Ministry of Education,Dalian University of Technology,Dalian 116024,China [2]Institute of Mechanical Manufacturing Technology,China Academy of Engineering Physics,Mianyang 621999,China

出　　处：《Chinese Journal of Mechanical Engineering》2024年第6期173-182,共10页中国机械工程学报(英文版)

基　　金：Supported by Science Challenge Project of China(Grant Nos.TZ2016006-0103,TZ2016006-0107-02);National Natural Science Foundation of China(Grant No.51975096);Liaoning Revitalization Talents Program of China(Grant No.XLYC1807230);National Key Research and Development Program of China(Grant No.2017YFA0701200)。

摘　　要：Thin copper substrates with high accuracy are highly required in precision physical experiments.However,even using double-sided lapping,the flatness is still limited due to the accuracy of lapping plate,process vibration and so on.Hence,as a subsequent process,this paper employs magnetorheological finishing(MRF)to further improve the flatness.Nevertheless,thin copper substrates,which are sensitive to the stress,deformed easily with uneven material removal on the surface.Therefore,MRF is adopted on machining thin copper substrate for the first time considering deformation induced by stress.A finite element model is established to evaluate the deformation by residual stress,and the results show that the deformation tends to be more serious with the increase of the material removal.According to the simulation results,the material removal is optimized considering both deformation and efficiency,and a series of experiments are conducted on aΦ100×2.8 mm workpiece to verify the simulation results.The experimental results show that the flatness is further improved from peak to valley(PV)6.6μm to PV 2.3μm with optimized processing parameters.Hence,the feasibility of magnetorheological finishing on thin copper substrate is demonstrated.

关 键 词：Magnetorheological finishing Thin copper substrate FLATNESS DEFORMATION 

分 类 号：TG1[金属学及工艺—金属学]