高性能非晶态透明导电Cd-In-O合金薄膜的光电特性及其柔性光伏应用  

High Performance Amorphous Transparent Conducting Cd-In-O Alloy Films:Optoelectronic Properties and Applications in Flexible Photovoltaics

作　　者：巫珊 叶芷桦 张洋 刘超平 WU Shan;YE Zhihua;ZHANG Yang;LIU Chaoping(Department of Physics,Shantou University,Shantou 515063,Guangdong,China;Department of Chemistry,Shantou University,Shantou 515063,Guangdong,China)

机构地区：[1]汕头大学理学院物理系,广东汕头515063 [2]汕头大学化学化工学院,广东汕头515063

出　　处：《汕头大学学报(自然科学版)》2025年第1期3-12,F0002,共11页Journal of Shantou University:Natural Science Edition

基　　金：广东省基础与应用基础研究委员会基金(2023A1515010556,2024A1515012961);国家自然科学基金委基金(12374073);李嘉诚基金会基金(2024LKSFG01)。

摘　　要：透明导电氧化物(TCOs)是现代光电子领域的关键材料.然而,常规以晶态In2O3:Sn为代表的TCOs薄膜在近红外波段透明度和机械柔性方面存在局限,这严重限制了其在全光谱器件和柔性光电子设备的应用.因此,开发具有全光谱透明度及良好柔性的TCOs薄膜显得尤为重要.本文利用室温磁控共溅射法生长了Cd_(1-x)In_(x)O_(1+δ)合金薄膜,研究了其晶体结构和光电特性随合金组分的变化.我们成功获得了高性能的非晶态透明导电Cd_(1-x)In_(x)O_(1+δ)合金薄膜,探究了其相应的环境稳定性和机械柔性,并探讨了其柔性太阳能电池应用.研究结果为非晶态透明导电Cd-In-O合金薄膜的深入研究与其光电应用提供了重要的参考依据.Transparent conductive oxides(TCOs)play a crucial role in modern optoelectronics.However,conventional TCO thin films,exemplified by crystalline In2O3:Sn,suffer from limitations in transparency in the near-infrared range and mechanical flexibility,thereby hindering their widespread use in full-spectrum devices and flexible optoelectronic applications.Hence,the development of TCO thin films with enhanced full-spectrum transparency and superior flexibility is of paramount importance.In this study,Cd_(1-x)In_(x)O_(1+δ)alloy thin films were fabricated using room temperature magnetron sputtering.The investigation focused on the variations in crystal structure and optoelectronic properties with changes in alloy composition.The research successfully yielded high-performance amorphous transparent conductive Cd_(1-x)In_(x)O_(1+δ)alloy thin films.Additionally,the study delved into exploring the environmental stability and mechanical flexibility of these films,along with discussing their potential applications in flexible solar cells.The findings presented in this research offer valuable insights for further exploration of amorphous transparent conductive Cd-In-O alloy thin films and their diverse optoelectronic applications.

关 键 词：透明导电氧化物 非晶态 Cd-In-O合金 光电性质 柔性太阳能电池 

分 类 号：O59[理学—应用物理] O469[理学—物理]