压阻式柔性压力传感器的研究进展  

Research Progress of Piezoresistive Flexible Pressure Sensor

作　　者：刘庆华 李丽 LIU Qing-hua;LI Li(School of Chemistry and Chemical Engineering,Heze University,Heze 274015,China)

机构地区：[1]菏泽学院化学化工学院,山东菏泽274015

出　　处：《安徽化工》2025年第1期1-6,共6页Anhui Chemical Industry

基　　金：山东省自然科学基金(ZR2022QB132,ZR2021QB203);菏泽学院博士基金(XY21BS19,XY21BS18)。

摘　　要：对压阻式柔性压力传感器的材料、传感性能指标优化方法进行了综述。探讨了柔性压力传感器在基底材料、活性层材料和电极材料领域的研究现状,重点对比总结了柔性压力传感器的结构设计,比较了平面薄膜结构、表面粗糙结构和三维多孔结构传感器的优缺点,以期为制备传感性能优异的新型柔性压力传感器提供参考。The materials and sensing performance optimization methods of piezoresistive flexible pressure sensors are reviewed.The research progress of the substrate,active layer and electrode materials of the flexible pressure sensor is introduced.The structural design of the flexible pressure sensor is summarized,and the advantages and disadvantages of the planar thin film structure,rough surface structure and three-dimensional porous structure of the sensor are compared,so as to provide reference for the preparation of the flexible sensor with excellent performance.

关 键 词：压阻式 柔性压力传感器 柔性材料 性能优化 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]