面向机载离散量芯片接口防雷需求的TVS结构及工艺设计  

TVS Structure and Process Design for Lightning Protection Requirements of Airborne Discrete Chip Interface

作　　者：魏敬奇 乔明[1,2] 齐钊 陈泓全[1,3] 蒲石 Wei Jingqi;Qiao Ming;Qi Zhao;Chen Hongquan;Pu Shi(State Key Laboratory of Electronic Thin Films and Integrated Devices of UESTC,Chengdu 610054,China;Guangdong Institute of Electronic and Information Engineering of UESTC,Dongguan 523808,China;Chongqing Institute of Microelectronics Industry Technology of UESTC,Chongqing 401332,China;Xi’an Xiangteng Micro-Electronic Technology Co.,Ltd.,Xi’an 710069,China)

机构地区：[1]电子科技大学电子薄膜与集成器件全国重点实验室,四川成都610054 [2]电子科技大学广东电子信息工程研究院,广东东莞523808 [3]电子科技大学重庆微电子工业技术研究院,四川重庆401332 [4]西安翔腾微电子科技有限公司,陕西西安710069

出　　处：《航空科学技术》2024年第12期96-102,共7页Aeronautical Science & Technology

基　　金：航空科学基金(201943080002);广东省基础与应用基础研究基金(2021B1515020031);中国博士后科学基金(2021M700684);四川省科技计划项目(2022YFG0165);重庆市自然科学基金(cstc2021jcyj)。

摘　　要：随着航空技术的发展,电子设备设施已广泛应用于机载系统中,而离散量信号作为飞机航电系统的最重要的信号之一,应用在机电控制信号、设备状态指示信号等多种场景。离散量信号具有产生电路简单、抗干扰能力强的特性,使其非常适合应用于机上电磁环境恶劣位置的信号传输,但这对机载离散量处理芯片的可靠性也提出了极高的要求,因此雷电防护便成为机载离散量处理芯片设计过程中的必要考虑因素。针对机载离散量处理芯片信号接口的雷电防护要求,本文提出了一种瞬态电压抑制器(TVS)阵列结构以及相应工艺设计,用作机载离散量处理芯片的防雷击器件,经测试,该TVS电流能力达到5.26A,且可承受±11kV的静电放电(ESD)应力,具有较强的浪涌和雷电保护能力,因此可以为机载离散量处理芯片中的高速数据接口提供强大的雷击和ESD保护,具有较强的应用价值。With the development of aviation technology,electronic equipment and facilities have been widely used in airborne systems.As one of the most important signals of aircraft avionics systems,discrete signals are used in electromechanical control signals,equipment status indication signals and other scenarios.The discrete signal has the characteristics of simple generation circuit and strong anti-interference ability,which makes it very suitable for signal transmission in the harsh electromagnetic environment on board.However,it also puts forward extremely high requirements for the reliability of airborne discrete processing chip.Therefore,lightning protection has become a necessary consideration in the design process of airborne discrete processing chip.Aiming at the lightning protection requirements of the signal interface of the airborne discrete processing chip,this paper proposes a TVS array and its corresponding process design as a lightning protection device for the airborne discrete processing chip based on the improved BCD process.After testing,the TVS current capability reaches 5.26A,and can withstand±11kV ESD stress.It has strong surge and lightning protection capabilities,so it can provide strong lightning and ESD protection for highspeed data interfaces in airborne discrete processing chips,and has strong application value.

关 键 词：机载系统 离散量 雷电防护 瞬态电压抑制器 高速数据接口 

分 类 号：TN406[电子电信—微电子学与固体电子学]