有机载膜对防离子反馈MCP性能的影响  

Effect of Organic Membrane on the Performance of Ion Barrier Microchannel Plate

作　　者：杨凯莉 张妮 郝子恒 朱宇峰 孙超 高雨挺 王江浩 YANG Kaili;ZHANG Ni;HAO Ziheng;ZHU Yufeng;SUN Chao;GAO Yuting;WANG Jianghao(Science and Technology on Low-Light-Level Night Vision Laboratory,Xi'an 710065,China;Kunming Institute of Physics,Kunming 650223,China)

机构地区：[1]微光夜视技术重点实验室,陕西西安710065 [2]昆明物理研究所,云南昆明650223

出　　处：《红外技术》2025年第2期250-256,共7页Infrared Technology

摘　　要：有机载膜作为Al_(2)O_(3)防离子反馈膜制备的临时衬底,其膜层厚度及致密度显著影响防离子反馈微通道板(MCP)的电子透过性及电特性。本文利用台阶仪及金相显微镜研究了有机载膜厚度对其膜层致密度的影响,并结合微通道板综合性能测试台分析膜层厚度对防离子反馈MCP电子透过性及电特性的影响。研究结果证明有机载膜膜层致密度随其厚度的增加而提高;有机载膜厚度低至17 nm时,其膜层致密度低,电子可直接从有机载膜内的微孔穿过,使得带有机载膜及Al_(2)O_(3)薄膜的微通道板具备一定的电子透过性;有机载膜厚度增加至136 nm,膜层致密度显著提升,带有机载膜及Al_(2)O_(3)薄膜的微通道板几乎可阻挡所有入射电子,这也是仅带Al_(2)O_(3)膜的防离子反馈MCP的阈值电压及电子增益损失量随有机载膜厚增加的重要原因;有机载膜厚度处于56~101 nm之间可满足高增益、高致密性防离子反馈MCP的性能最佳需求。Organic membranes are used as temporary substrates for the preparation of Al_(2)O_(3) ion barrier films,and their thickness and compactness significantly affect the electron transmittance and electrical characteristics of the ion barrier microchannel plate(MCP).The micromorphologies of organic membranes with different thicknesses were analyzed using a step tester and metallographic microscope,and the electron transmittance and electrical characteristics of the ion barrier MCP were tested using comprehensive performance test equipment.The results show that the compactness of the organic membrane increases with increasing organic membrane thickness.When the thickness of the organic membrane is as low as 17 nm,the electrons can directly penetrate through the micropores in the organic membrane,which has low compactness;therefore,the MCP with the organic membrane and Al_(2)O_(3) film shows good electron permeability.As the thickness of the organic membrane increases to 136 nm with high compactness,the MCP with the organic membrane and Al_(2)O_(3) film can block almost all incident electrons.This explains why the threshold voltage and loss of current gain of the ion barrier MCP with Al_(2)O_(3) film increase as the thickness of the organic membrane increases.The optimal thickness of the organic membrane is approximately 56–101 nm,as it satisfies the high-current gain and high-compactness ion barrier requirements of MCPs.

关 键 词：微通道板 有机载膜 电子透过特性 电特性 

分 类 号：TN223[电子电信—物理电子学]