电感耦合等离子体质谱法测定表面铍污染的不确定度评定  

Uncertainty evaluation for determination beryllium surface contamination by inductively coupled plasma mass spectrometry

作　　者：侯蓓蓓 刘忠英[1] 姜迪 韩文睿 陈贵生 刘阳 杜林[1] 钱渊[1] 姚剑[1] HOU Bei-bei;LIU Zhong-ying;JIANG Di;HAN Wen-rui;CHEN Gui-sheng;LIU Yang;DU Lin;QIAN Yuan;YAO Jian(Shanghai Institute of Applied Physics,Chinese Academy of Sciences,Shanghai 201800,China)

机构地区：[1]中国科学院上海应用物理研究所,上海201800

出　　处：《化学研究与应用》2025年第2期454-458,共5页Chemical Research and Application

基　　金：国家自然科学青年基金项目(11705267)资助。

摘　　要：为了保证电感耦合等离子体质谱法测定表面铍污染浓度的准确性与可靠性,对测定结果进行不确定度评定。分析测量过程中不确定度的来源,建立不确定度评价的数学模型,对不确定度分量进行量化和合成。计算结果表明,当表面铍污染浓度为0.199μg/100 cm^(2)时,其扩展不确定度为0.012μg/100 cm^(2)(k=2)。分析不同来源对不确定度的影响,提出提高检测准确度的优化方法。In order to ensure the accuracy and reliability of determining the concentration of surface beryllium contamination using Inductively Coupled Plasma Mass Spectrometry(ICP-MS),an assessment of uncertainty in the measurement results was conducted.The sources of uncertainty in the measurement process were analyzed,and a mathematical model for uncertainty evaluation was established to quantify and synthesize the uncertainty components.When the surface beryllium contamination concentration is 0.199μg/100 cm^(2),the expanded uncertainty is 0.012μg/100 cm^(2)(k=2).The impact of different sources on uncertainty was analyzed,and optimization methods to improve detection accuracy were proposed.

关 键 词：电感耦合等离子体质谱 铍 表面污染 不确定度评定 

分 类 号：O657.3[理学—分析化学]