一种声表面波NH_(3)传感器的研制及性能优化  

Preparation and performance study of a surface acoustic wave NH_(3) sensor

作　　者：许峥 范理 徐晓东[1] 程利平 张淑仪[1] Xu Zheng;Fan Li;Xu Xiaodong;Cheng Liping;Zhang Shuyi(Key Laboratory of Modern Acoustics,Ministry of Education,Institute of Acoustics,Nanjing University,Nanjing,210093,China)

机构地区：[1]近代声学教育部重点实验室,南京大学声学研究所,南京210093

出　　处：《南京大学学报(自然科学版)》2025年第1期47-57,共11页Journal of Nanjing University(Natural Science)

基　　金：国家重点研发计划(2020YFA0211400);国家自然科学基金(12274218,11774169)

摘　　要：氨气(NH_(3))是人类生活与化工生产中最常见的气体之一.高浓度的NH_(3)对人体与环境会产生危害,需要开发高灵敏度的NH_(3)传感器对痕量的NH_(3)进行检测,因此,提出了一种用于室温下检测痕量NH_(3)的声表面波传感器.该传感器是在128°YX⁃LiNbO_(3)压电基底上生长一层还原氧化石墨烯(Reduced Graphere Oxide,RGO)敏感层,并通过真空溅射的方法在敏感层上镀一层铂(Pt)来进一步增强传感器的传感能力.实验表明,该传感器具有高灵敏度,在室温下对浓度为50 ppm的NH_(3)能获得8.68 kHz的频率偏移.此外,研究了湿度与背景气对传感器性能的影响,实验结果表明,较高的湿度有利于提高传感器灵敏度,并且传感器在氩气背景气中的灵敏度稍高于在空气背景气中的灵敏度.该传感器的响应与NH_(3)浓度呈线性关系,并且具有良好的可重复性与稳定性.Ammonia(NH_(3))is a common gas in daily life and industrial production.Because NH_(3)with a high concentration exerts harm on humans,sensors with high performance are required to detect NH_(3)with trace concentrations.This work presents a surface acoustic wave sensor for detecting NH_(3)at room temperature.A reduced graphene oxide(RGO)sensitive layer is grown on a 128°YX⁃LiNbO_(3) piezoelectric substrate,and platinum(Pt)is deposited on the sensitive layer via vacuum sputtering to enhance the sensitivity of the sensor.The experiment shows that the sensor has a high sensitivity,which exhibits a frequency shift of 8.68 kHz towards 50 ppm NH_(3)at room temperature.It is observed that the sensor possesses a higher sensitivity when humidity is higher.Additionally,a higher sensitivity of the sensor is obtained in argon than that in air.Moreover,the frequency shift of the sensor is linearly related to NH_(3)concentration,and the sensor exhibits good repeatability and robustness.

关 键 词：声表面波传感器 石墨烯 NH_(3)传感器 

分 类 号：X851[环境科学与工程—环境工程] TP212[自动化与计算机技术—检测技术与自动化装置]