粉体特性对流延法制备Al_(2)O_(3)陶瓷基片的影响  

Effects of Powders on the Preparation of Al_(2)O_(3) Ceramic Substrates by Tape Casting Method

作　　者：王贝 刘林杰[1] 吴亚光[1] 张义政 WANG Bei;LIU Lin-jie;WU Ya-guang;ZHANG Yi-zheng(The 13th Research Institute of China Electronics Technology Group Corporation)

机构地区：[1]中国电子科技集团公司第十三研究所

出　　处：《中国标准化》2024年第S1期381-384,共4页China Standardization

摘　　要：Al_(2)O_(3)陶瓷基片因其优良性能被广泛应用在电子工业领域,目前国内外制备氧化铝陶瓷基片应用最广泛的工艺为流延成型,而氧化铝粉体做为原料,其性能测试及筛选尤为重要,决定了陶瓷素坯的质量以及后续陶瓷基片的强度、致密度等性能。本文研究了不同氧化铝粉体对流延法制备Al_(2)O_(3)陶瓷基片的影响,分别从粉体特性、烧结后陶瓷的显微形貌及性能来对比,结果表明:分别选用两种不同氧化铝粉体,两者制备的氧化铝陶瓷基片抗弯强度>400MPa,相对密度>95%,微观形貌相似,两种粉体性能接近,可实现两种粉体的应用。Al_(2)O_(3) ceramic substrates are used in the electronic industry widely due to their excellent performance.At present,the tape casting process is the most widely used process for preparing Al_(2)O_(3) ceramic substrates at home and abroad.Aluminum oxide is the raw material,its performance testing and screening are important particularly,as it determines the quality of ceramic green tapes and the strength and density of ceramic substrates,etc.In this paper,the effects of different alumina powders on the preparation of ceramic substrates by tape casting process are studied.Compared with the properties of different powders and microstructure and properties of sintered ceramic,the results show that the bending strength of alumina ceramic substrates prepared by different alumina powders is greater than 400 Mpa,the relative density is greater than 95%,and the microstructure is similar,which can realize the application of different powder.

关 键 词：粉体 流延 Al_(2)O_(3)陶瓷 微观形貌 

分 类 号：TQ174.6[化学工程—陶瓷工业]