基于大长度三路激光绝对测长系统的激光位移传感器校准方法研究  

Research on Calibration Method of Laser Displacement Sensor Based on Large Length Three Channel Laser Absolute Length Measurement System

作　　者：赵彦龙 郭鑫 ZHAO Yanlong;GUO Xin

机构地区：[1]南京市计量监督检测院

出　　处：《计量与测试技术》2025年第1期6-9,共4页Metrology & Measurement Technique

基　　金：国家市场监督管理总局科技计划项目(项目名称:数字化空间大长度虚拟基准的研制与倍乘激光比长测量方法的研究,项目编号:2022MK155)。

摘　　要：在激光位移传感器校准过程中,通过会因测量轴线与标准轴线不在同一条直线上而产生阿贝误差,且该误差会随测量距离的增大而增大。本文提出一种基于大长度三路激光绝对测长系统的激光位移传感器校准方法,通过构造一路与其同轴线的虚拟光路减小阿贝误差。同时,在(0~500)mm范围内开展了激光位移传感器校准实验,并进行灵敏度、基本误差、线性度、回归误差和重复性评价。In the process of laser displacement sensor calibration,Abbe error usually occurs because the measurement axis is not in the same line as the standard axis,and the error will increase with the increase of the measurement distance.In this paper,a calibration method of laser displacement sensor based on a large length three-way laser absolute length measuring system is proposed.The Abbe error is reduced by constructing a virtual optical path with its coaxial line.At the same time,the calibration experiment of the laser displacement sensor was carried out in the range of(0~500)mm,and the sensitivity,basic error,linearity,regression error and repeatability were evaluated.

关 键 词：阿贝误差 激光位移传感器 校准 计量学 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TN249[自动化与计算机技术—控制科学与工程]