微区X射线荧光光谱分析技术研究进展  

Research Progress of Micro-X-ray Fluorescence Spectrometry

作　　者：姚强[1] 朱晓林[1] 朱宇宏[1] YAO Qiang;ZHU Xiaolin;ZHU Yuhong

机构地区：[1]江苏省产品质量监督检验研究院

出　　处：《计量与测试技术》2025年第1期30-32,共3页Metrology & Measurement Technique

基　　金：江苏省市场监督管理局科技计划项目(项目名称:金属材料微结构性能高通量快速检测关键技术研究,项目编号:KJ2022062)。

摘　　要：微区X射线荧光光谱分析技术是一种微束分析技术,具有灵敏度高、检测准确和不损伤样品等优点。本文基于该技术的基本原理,对仪器种类和应用现状等进行分析。结果表明:该类设备具有无损、无热、快速、多元素同时分析等优点,且随着向小型化、智能化、易操作的方向发展,可使该技术成为众多研究领域中材料分析的有效手段。Micro-region X-ray fluorescence spectrometry is a kind of micro-beam analysis technology,which has the advantages of high sensitivity,accurate detection and no damage to the sample.Based on the basic principle of the technology,this paper analyzes the types of instruments and their application status.The results show that this kind of equipment has the advantages of non-destructive,no-heat,fast and multi-element simultaneous analysis,and with the development of miniaturization,intelligence and easy operation,this technology can become an effective means of material analysis in many research fields.

关 键 词：微区 X射线荧光 分析技术 研究进展 

分 类 号：TP3[自动化与计算机技术—计算机科学与技术]