大气压等离子体清洗不锈钢电极的表面分析  

Atmospheric Pressure Plasma for Stainless Steel Electrodes Surface Cleaning

作　　者：党梦佳 张佳 罗城 巴永汕 李庆开 DANG Mengjia;ZHANG Jia;LUO Cheng;BA Yongshan;LI Qingkai(School of Aerospace Science and Technology,Xidian University,Xi’an 710126,China)

机构地区：[1]西安电子科技大学空间科学与技术学院,西安710126

出　　处：《现代应用物理》2024年第6期202-209,共8页Modern Applied Physics

基　　金：强脉冲辐射环境模拟与效应全国重点实验室开放基金资助项目(SKLIPR2106)。

摘　　要：为提升大型Z箍缩装置的功率,清洗其电极表面,去除表面吸附气体和难以清除的杂质。采用大气压等离子体对不锈钢电极表面的吸附气体和杂质进行清洗,使用水接触角测量仪和X射线光电子能谱(X-ray photoelectron spectroscopy,XPS)对清洗前后电极表面的润湿性、化学成分和化学状态进行分析。结果表明,经等离子体清洗后,不锈钢电极表面的碳污染物质量分数从62.95%显著降低至37.68%,水接触角从70.76°最低降至29.31°,吸附在表面的水分子质量分数从17.31%最低降至5.9%。最后,基于不锈钢电极表面微量元素的变化过程和不锈钢表面污染物分层清洗模型,分析了大气压等离子体对不锈钢电极表面附着物的清洗过程。In order to increase the power of large Z-pinch devices,it is necessary to clean the surface of their electrodes to remove the adsorbed gases and stubborn impurities on the surface.In this paper,atmospheric pressure plasma is used to clean the absorbed gases,and impurities on the surface of stainless steel electrodes.The wettability,chemical composition and chemical state of the electrode surface before and after cleaning are analyzed using water contact angle measurement instrument and X-ray photoelectron spectroscopy(XPS).The results show that after plasma cleaning the mass fraction of carbon pollutants on the surface of stainless steel electrodes,significantly decreased from 62.95%to 37.68%,the water contact angle decreased from 70.76°to 29.31°,and the content of water molecules adsorbed on the surface decreased from 17.31%to 5.9%.Based on the changes process of micro-element content and the layered cleaning model of pollutants on the surface of stainless steel electrode,the cleaning process of atmospheric pressure plasma on the absorbed substances on the surface is analyzed.

关 键 词：大气压等离子体 不锈钢电极 碳污染物 润湿性 水接触角 X射线光电子能谱 

分 类 号：O53[理学—等离子体物理] TL99[理学—物理]