ZrON固溶体对L1_(0)FePt薄膜性能的影响  

The Effect of ZrON Solid Solution on the Properties of L1_(0)FePt Thin Films

作　　者：张敏 Zhang Min(College of Intelligent Manufacturing Industry,Shanxi University of Electronic Science and Technology,Linfen,Shanxi 041000)

机构地区：[1]山西电子科技学院智能制造产业学院,山西临汾041000

出　　处：《塑料包装》2025年第1期39-42,共4页Plastics Packaging

摘　　要：本文研究了ZrO_(2)掺杂含量对FePt-MgO薄膜结构与磁性能的影响,在ZrN中掺杂合适的比例的ZrO_(2)生成ZrON固溶体,从而获得具有(001)织构,柱状生并且颗粒均匀分布的L1_(0)FePt薄膜。试验结果表明:30vol.%ZrO_(2)掺杂进ZrN中形成了ZrON固溶体,使得FePt-ZrO_(2)-C颗粒在ZrON上实现良好的外延生长,有效地调节了表面能与界面能的大小,获得了接近于90°的接触角,得到均匀分离的颗粒,此时薄膜垂直方向矫顽力达到1.5KOe。This paper investigates the effect of ZrO_(2) doping content on the structure and magnetic properties of FePt MgO thin films.A suitable proportion of ZrO_(2) is doped into ZrN to generate ZrON solid solution,thereby obtaining L1_(0)FePt thin films with(001)texture,columnar growth,and uniform particle distribution.The experimental results show that 30vol.%ZrO_(2) is doped into ZrN to form a ZrON solid solution,which enables the FePt-ZrO_(2)-C particles to achieve epitaxial growth on ZrON,effectively adjusts the surface energy and interface energy,obtains a contact angle close to 90°,and achieves uniformly separated particles,with the vertical coercivity of the film reaching 1.5KOe.

关 键 词：L10FePt 薄膜 矫顽力 固溶体 

分 类 号：TB383.2[一般工业技术—材料科学与工程]