Ultra-high-Q photonic crystal nanobeam cavity for etchless lithium niobate on insulator(LNOI)platform  

作　　者：Zhi Jiang Cizhe Fang Xu Ran Yu Gao Ruiqing Wang Jianguo Wang Danyang Yao Xuetao Gan Yan Liu Yue Hao Genquan Han 

机构地区：[1]State Key Laboratory of Wide-Bandgap Semiconductor Devices and Integrated Technology,School of Microelectronics,Xidian University,Xi’an 710071,China [2]Key Laboratory of Light Field Manipulation and Information Acquisition,Ministry of Industry and Information Technology,and Shaanxi Key Laboratory of Optical Information Technology,School of Physical Science and Technology,Northwestern Polytechnical University,Xi’an 710129,China [3]Hangzhou Institute of Technology,Xidian University,Hangzhou 311200,China

出　　处：《Opto-Electronic Advances》2025年第1期59-70,共12页光电进展(英文)

基　　金：the National Key R&D Program of China(No.2022ZD0119002);the National Natural Science Foundation of China(Grant No.62025402,62090033,92364204,92264202 and 62293522);Major Program of Zhejiang Natural Science Foundation(Grant No.LDT23F04024F04)。

摘　　要：The expansive spectral coverage and superior optical properties of lithium niobate(LN)offer a comprehensive suite of tools for exploring novel functionalities.Achieving high-quality(Q)photonic resonator cavities is crucial for enhancing light-matter interactions.However,this task is challenging as the device performance is heavily dependent on the fabrication quality of the LN.In this paper,we present experimental validation of an etchless approach to fabricating high-Q photonic crystal nanobeam cavities(PCNBCs).We successfully fabricate PCNBCs with Q factors exceeding 105 while maintaining high transmittance by capitalizing on the low waveguide loss and high fabrication tolerance of TE-polarized mode.Remarkably,the Q factor achieved here exceeds previous reports on etchless LN PCNBCs by over an order of magnitude.Benefiting from this advancement,we further explore a variety of optical functions,including thermo-optic tuning,optically induced bistability,and Fano line shapes generation.These findings present promising prospects for a versatile platform technique,facilitating the development of high-performance electro-optic or acousto-optic modulators,optical logic devices,and quantum photonics,highlighting its significant impact in the field of photonic integration.

关 键 词：photonic crystal nanobeam cavity LNOI platform high Q thermo-optic tuning BISTABILITY Fano line shapes 

分 类 号：O43[机械工程—光学工程] O734[理学—光学]