基于仿生平面复眼透镜提高AlGaN基DUV Micro-LED光提取效率  

Improving the Light Extraction Efficiency of AlGaN-based DUV Micro LED Utilizing Planar Compound Eye Lens

作　　者：刘欢 杨涛[1,2] 王铠尧 刘宁炀 周文 谭起龙 Liu Huan;Yang Tao;Wang Kaiyao;Liu Ningyang;Zhou Wen;Tan Qilong(School of Electronic and Information Engineering,Wuyi University,Jiangmen,Guangdong 529000,China;Institute of Semiconductors,Guangdong Academy of Sciences,Guangzhou 510075,China;School of Materials Science and Engineering,Xi’an Jiaotong University,Xi’an 710049,China)

机构地区：[1]五邑大学电子与信息工程学院,广东江门529000 [2]广东省科学院半导体研究所,广州510075 [3]西安交通大学材料科学与工程学院,西安710049

出　　处：《机电工程技术》2025年第3期47-51,共5页Mechanical & Electrical Engineering Technology

基　　金：国家重点研发计划课题(2023YFB3609703);广东省自然科学基金(2023A1515011175);广州市基础与应用基础研究专题(2024A04J00263);广东省科学院科技计划项目(2022GDASZH-2022010111,2023GDASZH-2023030601-02)。

摘　　要：内全反射是限制AlGaN基深紫外微型发光二极管(DUV Micro-LED)光提取效率的重要因素之一,严重降低了深紫外LED的能量利用率和寿命。受到昆虫复眼结构高能量利用率的启发,提出了一种基于仿生平面复眼透镜提高AlGaN基Micro-LED光提取效率的方法。通过对中华大刀螳的复眼结构进行相位提取和重构,利用仿生平面复眼能够有效抑制介质表面的内全反射,从而实现深紫外LED光提取效率的显著提高。时域有限差分法(FDTD)仿真表明,通过在Micro-LED表面刻蚀仿生平面复眼透镜,其TE和TM模式的光提取效率分别提高了84.5%和242%。得益于仿生超构表面平面复眼透镜超薄的平面结构和工艺的兼容性,有望通过单次纳米压印提高深紫外发光二极管性能。此外,利用仿生特征的功能重构方法在大视场、结构照明和仿生结构等方面具有潜在的应用前景。Internal total reflection is one of the important factors limiting the light extraction efficiency of AlGaN-based deep ultraviolet micro light-emitting diodes(DUV Micro-LEDs),which seriously reduces the energy utilization and lifespan of deep ultraviolet LEDs.Taking inspiration from the high energy utilization of insect compound eye structures,a method based on biomimetic planar compound eye lenses is proposed to improve the light extraction efficiency of AlGaN-based Micro LEDs.By extracting and reconstructing the phase of the compound eye structure of the Tenodera sinensis,the use of biomimetic planar compound eyes can effectively suppress the internal total reflection of the dielectric surface,thereby achieving a significant improvement in the efficiency of deep ultraviolet LED light extraction.The finite difference time domain(FDTD)simulation shows that by etching a biomimetic planar compound eye lens on the Micro LED surface,the light extraction efficiency of TE and TM modes is improved by 84.5%and 242%,respectively.Thanks to the compatibility of the ultra-thin planar structure and process of the biomimetic metasurface planar compound eye lens,it is expected to improve the performance of deep ultraviolet lightemitting diodes through a single nanoimprinting.In addition,functional reconstruction methods utilizing biomimetic features have potential applications in large fields of view,structural lighting,and biomimetic structures.

关 键 词：深紫外微型发光二极管 光提取效率 平面复眼透镜 

分 类 号：TB17[生物学—生物工程]