一种液体微纳流量计直接动态校准方法的研究  

Research on a direct dynamic calibration method for liquid micro/nano flowmeter

作　　者：孙元社 龙翔 赵海青 杨三东 张聪 李彤 Sun Yuanshe;Long Xiang;Zhao Haiqing;Yang Sandong;Zhang Cong;Li Tong(Suzhou Elite Analytical Instruments Ltd.,Suzhou 215123,China;Dalian Elite Analytical Instruments Ltd.,Dalian 116023,China)

机构地区：[1]依利特(苏州)分析仪器有限公司,苏州215123 [2]大连依利特分析仪器有限公司,大连116023

出　　处：《分析仪器》2025年第1期88-90,共3页Analytical Instrumentation

基　　金：“十四五”国家重点研发计划(2021YFC2401100)项目资助。

摘　　要：超微小液体流量的测量,以及液体微纳流量计的准确度直接校准一直是个技术难题。本研究采用百万分之一精密电子天平,基于液体通过微米毛细管输出的极微小液滴质量,对超微小液体流量计进行直接动态校准。结果显示,采用微纳输液泵和超高精度精密电子天平等搭建的微纳升液体流量计校准装置,可以实现极其微小液体流量计(或流量传感器)的直接校准,方法简单、快速、精密度高。The measurement of ultra small liquid flowrate and the direct calibration of the accuracy for liquid micro/nano flowmeter have always been a technical challenge.In this study,a precision electronic balance of one millionth is used to perform direct dynamic calibration for ultra small liquid flowmeter based on the mass of extremely small droplets outputted by the liquid through micrometer capillary tubes.The results show that the calibration device for micro/nano liquid flowmeter,which is built using micro/nano infusion pumps and ultra-high precision electronic balances,can achieve direct calibration of extremely small flow meters(or flow sensors).The method is simple,fast,and has high precision.

关 键 词：液体流量计 流量传感器 微/纳升 直接动态校准 

分 类 号：TH814[机械工程—仪器科学与技术]