基于集成氮化硅超表面VCSEL的涡旋光输出  

Vortex Light Output Based on Integrated Silicon Nitride Metasurface VCSEL

作　　者：牛昊 王永丽 姜增璇 李川川 魏志鹏 宋国峰[3] NIU Hao;WANG Yongli;JIANG Zengxuan;LI Chuanchuan;WEI Zhipeng;SONG Guofeng(State Key Laboratory of High Power Semiconductor Laser,Changchun University of Science and Technology,Changchun 130022,China;Zhongshan Institute of Changchun University of Science and Technology,Zhongshan 528437,China;Laboratory of Nano-Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China)

机构地区：[1]长春理工大学高功率半导体激光国家重点实验室,吉林长春130022 [2]长春理工大学中山研究院,广东中山528437 [3]中国科学院半导体研究所纳米光电子实验室,北京100083

出　　处：《发光学报》2025年第2期326-333,共8页Chinese Journal of Luminescence

基　　金：中华人民共和国科学技术部(2023YFB4604400);国家自然科学基金(12074045,62027820,61904017);吉林省自然科学基金(20230101352JC);国家“111”计划项目(D17017)。

摘　　要：集成光子器件技术的最新进展充分满足了市场对于紧凑型、高效光电系统的需求,同时也有力地促进了光学超表面技术的发展。其中,垂直腔面发射激光器(VCSEL)与超表面的集成,可生成具有特定波前的矢量光束,极大地增强光电系统的功能性和灵活性。本文设计了基于Si_(3)N_(4)纳米天线阵列超表面的850 nm VCSEL,通过对纳米天线结构参数的调控,实现了超过2π的相位覆盖,并采用1阶和2阶涡旋相位板,成功产生了不同阶数的涡旋光束。这一成果为光学超表面调控VCSEL光场技术提供了新思路。The latest development of integrated photonic device technology fully meets the market demand for compact and efficient optoelectronic systems,and also effectively promotes the development of optical metasurface technology.Among them,the integration of vertical cavity surface emitting laser(VCSEL)and metasurface can generate vector beams with specific wavefronts,which greatly enhances the functionality and flexibility of optoelectronic systems.In this paper,an 850 nm VCSEL based on Si_(3)N_(4) nanoantenna array metasurface is designed.By adjusting the structural parameters of the nanoantenna,more than 2π phase coverage is achieved,and vortex beams of different orders are successfully generated by using first-order and second-order vortex phase plates.This result provides a new idea for the optical metasurface control of VCSEL light field technology.

关 键 词：超表面 涡旋光束 垂直腔面发射激光器 集成光子器件 

分 类 号：O436[机械工程—光学工程] TN248.4[理学—光学]