芯片尺寸与阵列偏移对图形衬底Micro-LED光强空间分布的影响  

Influence of Chip Size and Array Offset on Spatial Distribution of Light Intensity in PSS Micro-LEDs

作　　者：张佳辰 李盼盼 李金钗 黄凯 李鹏岗 ZHANG Jiachen;LI Panpan;LI Jinchai;HUANG Kai;LI Penggang(Internation Digital Economy College,Minjiang University,Fuzhou 350108,China;Future Display Institute,Xiamen 361000,China;College of Physical Science and Technology,Xiamen University,Xiamen 361000,China)

机构地区：[1]闽江学院国际数字经济学院,福建福州350108 [2]未来显示技术研究院,福建厦门361000 [3]厦门大学物理科学与技术学院,福建厦门361000

出　　处：《发光学报》2025年第2期366-372,共7页Chinese Journal of Luminescence

基　　金：国家重点研发计划(2022YFF0609504);国家自然科学基金(62174141)。

摘　　要：微型发光二极管(Micro-light emitting diode,Micro-LED)以高亮度、高对比度、低能耗和快速响应等优异特性,广泛应用于户外显示、增强现实和虚拟现实等领域。然而,Micro-LED的微型化带来了光强分布控制的挑战。为提高其发光效率,常使用图形蓝宝石衬底(Patterned sapphire substrate,PSS)技术,通过微米级图形单元优化光提取率。在大尺寸LED中,PSS对光强空间分布影响较小,但在微米级Micro-LED中影响显著。本文采用光线追迹方法,系统研究了发光波长为460 nm的不同尺寸PSS Micro-LED在不同阵列偏移下的光强空间分布,并量化了光强空间分布的非对称率,最后解释了该现象。结果表明,随着尺寸减小,PSS对光强空间分布影响增大。当尺寸为3μm×5μm时,在y轴和x轴的光强空间分布的非对称率达3.06%和4.22%,因而影响Micro-LED发光均匀性。本研究为Micro-LED在显示应用中的优化设计提供了理论支持。Micro-light-emitting diodes(Micro-LEDs)with high brightness,high contrast,low energy consumption and fast response and other excellent characteristics,are widely used in outdoor display,augmented reality and virtual reality and other fields.However,the miniaturization of Micro-LEDs brings challenges to the control of light intensity distribution.In order to improve its luminous efficiency,patterned sapphire substrate(PSS)technology is often used to optimize the light extraction efficiency through micron-scale patterned structures.In large-size LEDs,PSS has a small effect on the spatial distribution of light intensity,but it has a significant effect in micro-level LEDs.In this paper,the ray tracing method is employed to systematically study the spatial distribution of light intensity in PSS Micro-LEDs of different sizes,with an emission wavelength of 460 nm,under various array offsets.The spatial asymmetry of the light intensity distribution is also quantified.The results show that as the size decreases,the influence of PSS on the spatial distribution of light intensity increases.When the size is 3μm×5μm,the asymmetry of the spatial distribution of light intensity reaches 3.06%on the y-axis and 4.22% on the x-axis,thus affecting the luminous uniformity of the Micro-LED.

关 键 词：Micro-LED 图形蓝宝石衬底(PSS) 非对称率 

分 类 号：TN312.8[电子电信—物理电子学]