高温压电力传感器结构优化与测量性能研究  

Study on the Influence Rule of Structural form on the Sensitivity of High-temperature Piezoelectric Force Sensors

作　　者：李宏宇 王桂从[1,2] 徐鹏 李映君 LI Hong-yu;WANG Gui-cong;XU Peng;LI Ying-jun(School of Mechanical Engineering,University of Jinan,Jinan 250022,China;Shandong Key Laboratory of Sensing Technology and High Precision Weighing Instruments,Jinan 250004,China)

机构地区：[1]济南大学机械工程学院,山东济南250022 [2]山东省传感器技术与高精度衡器重点实验室,山东济南250004

出　　处：《山东工业技术》2025年第1期25-31,共7页Journal of Shandong Industrial Technology

基　　金：山东省科技型中小企业创新能力提升工程项目(2024TSGC0912);山东省科技型中小企业创新能力提升工程项目(2022TSGC2100);山东省自然科学基金项目(ZR2023ME09);济南市“新高校20条”资助项目(202228116)。

摘　　要：针对高温压电力传感器压电灵敏度较低的问题,提出了一种无中心柱压电传感器结构。通过分析传感器传力路线,基于机理建模法建立传感器静力学模型并推导出无中心柱结构传感器的压电灵敏度公式,使用有限元仿真软件对比分析了中心柱对传感器压电灵敏度的影响。仿真结果表明无中心柱传感器仿真压电灵敏度为53.37 pC/N,比有中心柱传感器灵敏度提高12.67%。搭建了高温动态力测试平台对两种不同结构传感器压电灵敏度进行测试,测试结果表明在350℃环境下无中心柱传感器灵敏度为32.7 pC/N,相较于有中心柱传感器提高7.03%。结果表明,本文提出的无中心柱传感器结构明显提升了高温压电力传感器的灵敏度,对今后的高温力传感器结构研究具有重要意义。A center column free piezoelectric sensor structure is proposed to address the issue of low sensitivity of high-temperature piezoelectric sensors.By analyzing the force transmission path of the sensor,a static model of the sensor was established based on the mechanism modeling method,and the piezoelectric sensitivity formula of the sensor without a central column structure was derived.The influence of the central column on the piezoelectric sensitivity of the sensor was compared and analyzed using finite element simulation software.The simulation results show that the piezoelectric sensitivity without a central column sensor is 53.37 pC/N,which is 12.67%higher than that with a central column sensor.A high-temperature dynamic force testing platform was built to test the piezoelectric sensitivity of two different structural sensors.The test results showed that the sensitivity of the sensor without a center column was 32.7 pC/N at 350℃,which was 7.03%higher than that of the sensor with a center column.The results indicate that the proposed center column free sensor structure significantly improves the sensitivity of high-temperature piezoelectric sensors,which is of great significance for future research on high-temperature force sensor structures.

关 键 词：高温压电力传感器 传感器结构设计 压电陶瓷 

分 类 号：TP18[自动化与计算机技术—控制理论与控制工程]