化学气相沉积法制备氮化硼纳米管研究进展  

Progress in Synthesis of Boron Nitride Nanotubes with Chemical Vapor Deposition

作　　者：黄潇阳 李亚格 屈超 彭金琦 张少伟[1] 张海军[1] HUANG Xiaoyang;LI Yage;QU Chao;PENG Jinqi;ZHANG Shaowei;ZHANG Haijun(The State Key Laboratory of Refractories and Metallurgy,Wuhan University of Science and Technology,Wuhan 430081,Hubei,China)

机构地区：[1]武汉科技大学省部共建耐火材料与冶金国家重点实验室,湖北武汉430081

出　　处：《陶瓷学报》2025年第1期30-42,共13页Journal of Ceramics

基　　金：国家自然科学基金(52072274,52272021,52232002,U23A20559)。

摘　　要：氮化硼纳米管(BNNTs)具有与碳纳米管(CNTs)相似的管状纳米结构,因其优异的热稳定性、良好的生物相容性、优异的电绝缘性、高的热导率以及疏水疏渣等性能,在化工、冶金及生物医学等领域具有广泛的应用前景。BNNTs的合成方法众多,其中,化学气相沉积(CVD)法具有设备简单、反应温度低和产物纯度高等特点,而成为合成BNNTs的最佳方法之一。综述了不同CVD技术、前驱体种类、实验装置、气体流量及衬底位置等工艺因素对制备BNNTs的影响。同时,也对该领域未来的研究发展方向进行了展望。[Significance]Boron nitride nanotubes(BNNTs)have a tubular nanostructure similar to carbon nanotubes(CNTs).Owing to their excellent thermal stability,good biocompatibility,excellent electrical insulation,high thermal conductivity and superhydrophobicity,BNNTs have broad application prospects in various fields,such as chemical,metallurgical and biomedical industries.The performance of BNNTs is determined by their purity,size and arrangement,which are dependent on the synthesis methods.The preparation methods for BNNTs include chemical vapor deposition(CVD),arc discharge,laser ablation,template,plasma-enhanced and ball milling–annealing methods.Compared with other preparation techniques,chemical vapor deposition(CVD)offers various advantages,such as simple equipment,low reaction temperature and high purity of the final product.The growth of BNNTs typically follows the vapor-liquid-solid(VLS)mechanism.The precursor powder reacts to produce B_(2)O_(2) vapor,which then reacts with N_(2) from NH_(3) to form h-BN.Over time,h-BN continues to condense until it becomes supersaturated and precipitates as BNNTs.In this paper,the effects of preparation methods,precursors,experimental setup,gas flow rate and substrate position on the properties of BNNTs are summarized,while future research directions in the field are discussed.[Progress]First of all,the preparation of BNNTs via CVD can be divided into boron oxide chemical vapor deposition(BOCVD),argon-assisted thermal chemical vapor deposition(Ar-TCVD)and other CVD methods.The advantages and disadvantages of BNNTs prepared via different CVD methods are discussed in detail.Among them,BNNTs synthesized by BOCVD method usually use B as boron source and metal or its compounds as catalysts.Solid boron source has low toxicity,thus preventing environmental pollution,injury to experimental personnel and corrosion of equipment.The Ar-TCVD method has been widely used in the preparation of BNNTs.Compared with the BOCVD method,in the Ar-TCVD method,the issue of the too high flow rate of

关 键 词：氮化硼 纳米管 化学气相沉积法 

分 类 号：TQ174.75[化学工程—陶瓷工业]