飞秒激光诱导钛合金表面减反射结构演化机制研究  

Femtosecond laser-induced structural evolution of surface anti-reflective structures in titanium alloys

作　　者：王会 李奔 曹泽浩 何宗泰 WANG Hui;LI Ben;CAO Ze-hao;HE Zong-tai(Ultrafast laser Processing Research Centre,School of Engineering,Hubei University of Technology,Wuhan 430068,China;Hubei Key Laboratory of Modern Manufacturing Quality Engineering,School of Mechanical Engineering,Hubei University of Technology,Wuhan 430068,China)

机构地区：[1]湖北工业大学机械工程学院,超快激光加工研究中心,湖北武汉430068 [2]湖北工业大学机械工程学院,现代制造质量工程湖北省重点实验室,湖北武汉430068

出　　处：《激光与红外》2025年第1期67-74,共8页Laser & Infrared

摘　　要：鉴于航空航天领域对钛合金光学器件表面减反射性能的需求,本实验利用飞秒脉冲激光对TC4钛合金表面制备减反射微纳结构。通过脉冲激光直写的方法,采用对样品进行0°和90°交叉扫描的加工方式,探究了激光单脉冲能量密度和脉冲串子脉冲个数对TC4钛合金表面的反射率以及微观形貌的影响,避免钛合金表面硬度因加工产生的热影响而发生变化,采用不同方式对样品进行处理。采用分光光度计测试后TC4钛合金样品的反射率,并且利用扫描电子显微镜(SEM)观察样品的微观形貌。结果表明,当激光的能量密度为1.27 J/cm^(2)、扫描速度为300 mm/s、扫描间距为0.0015 mm、脉冲串子脉冲个数为1时,样品在可见光波段(400 nm~780 nm)的平均反射率达到1.70%以下,在波长为300 nm时,反射率达到1.30%以下。本实验研究结果使卫星相机遮光罩、位标器等重要器件表面对杂散光的抑制具有一定的指导意义。In view of the demand of antireflection performance of titanium alloy optical device surface in aerospace field,the antireflection micro-nano structure of TC4 titanium alloy surface is prepared by femtosecond pulsed laser in this experiment.Firstly,the effects of laser monopulse energy density and the number of pulse subpulses on the surface reflectivity and micromorphology of TC4 titanium alloy are investigated by means of 0°and 90°cross-scanning of the sample by pulsed laser direct writing method,so as to avoid the surface hardness of titanium alloy from changing due to the thermal effect of processing,and to treat the samples by means of different modalities.The reflectance of TC4 titanium alloy samples is measured by spectrophotometer,and the microstructure of the samples is observed by scanning electron microscope(SEM).The results show that when the energy density of the laser is 1.27 J/cm^(2),the scanning speed is 300 mm/s,the scanning distance is 0.0015 mm,and the number of pulses subpulses is 1,the average reflectance of the sample reaches less than 1.70%in the visible wavelength band(400 nm~780 nm),and the reflectance reaches less than 1.30%at the wavelength of 300 nm.The results of this experiment can provide some guidance for the suppression of stray light on the surface of important devices such as the shutter and the position marker of satellite camera.

关 键 词：TC4钛合金 减反射 飞秒激光 burst模式 微纳结构 

分 类 号：TG665[金属学及工艺—金属切削加工及机床] TN249[电子电信—物理电子学]