大功率激光直写设备光学系统分析与散热设计  

Optical system analysis and heat dissipation design of high-power laser direct writing equipment

作　　者：胡兴涛 田磊磊 童宝宏[3] 苗思忠 周硕 李凡 陈堃 王儒 HU Xing-tao;TIAN Lei-lei;TONG Bao-hong;MIAO Si-zhong;ZHOU Shuo;LI Fan;CHEN Kun;WANG Ru(School of Mechanical Engineering,Anhui Institute of Information Technology,Wuhu 241000,China;School of Mechanical And Automotive Engineering,Anhui Polytechaic University,Wuhu 241000,China;School of Mechanical Engineering,Anhui University of Technology,Maanshan 243032,China)

机构地区：[1]安徽信息工程学院机械工程学院,安徽芜湖241000 [2]安徽工程大学机械与汽车工程学院,安徽芜湖241000 [3]安徽工业大学机械工程学院,安徽马鞍山243032

出　　处：《激光与红外》2025年第1期102-110,共9页Laser & Infrared

基　　金：安徽省高等学校自然科学研究项目(No.KJ2021A1205,No.KJ2021ZD0144);安徽工程大学科研启动基金项目(No.S022022113)资助。

摘　　要：本文针对一款大功率激光直写设备光学系统,采用了数值模拟与试验相结合的方法,并设计了一款镜筒的散热结构。利用有限元分析软件对光学系统结构进行了热分析与应力应变分析,分析结果显示:光学系统激光功率为100 W,SUS304和AL6061材质的镜筒表面温度最高位置都集中在棱镜盒附近区域,最高温度达59.016℃,整体温度均匀性和散热性能较差;AL6061材质光学镜筒棱镜盒附近区域存在较大的应力,结构性能较差。总结光学系统散热设计的一般原则,采用被动和主动相结合的散热设计,并进行了试验验证,试验结果表明:在散热系统正常工作时,系统整体温差为0.99℃,达到了温度均匀性指标要求;DMD标定误差小于15μm且中心位置多向同一方向漂移,满足误差小于20μm的技术指标要求,有利于系统曝光时图像拼接,验证了散热设计的有效性。The method of combining numerical simulation and experiment is adopted for the optical system of a high-power direct writing device,and the heat dissipation structure of a lens barrel is designed.The thermal analysis and stress-strain analysis of the structure of the optical system were carried out by finite element analysis software,and the analysis results showed that the laser power of the optical system was 100 W,and the highest surface temperature of the lens barrel made of SUS304 and AL6061 was concentrated in the area near the prism box,with a maximum temperature of 59.016℃,and the overall temperature uniformity and heat dissipation performance were poor.The test results show that when the heat dissipation system is working normally,the overall temperature difference of the system is only 0.99℃,which meets the requirements of temperature uniformity,and the DMD calibration error is less than 15μm and the center position drifts in the same direction,which meets the technical index requirements of less than 20μm,which is conducive to the image stitching when the system is exposed,and verifies the effectiveness of the heat dissipation design.

关 键 词：大功率激光直写设备 光学系统 热分析 应力应变分析 散热设计 试验验证 

分 类 号：TN365[电子电信—物理电子学]