电涡流传感器探头线圈结构仿真与研究  

Simulation and Research of Eddy Current Sensor Probe Coil Structure

作　　者：武勇琪 张智杰[1] 王传清 肖从斌 WU Yong-qi;ZHANG Zhi-jie;WANG Chuan-qing;XIAO Cong-bin(Huazhong Institute of Electro-Optic-Wuhan National Laboratory for Optoelectronics,Wuhan 430223,China)

机构地区：[1]华中光电技术研究所-武汉光电国家研究中心,湖北武汉430223

出　　处：《光学与光电技术》2025年第1期108-116,共9页Optics & Optoelectronic Technology

摘　　要：为了提高电涡流传感器的灵敏度与精度,研究探讨了电涡流传感器中激励频率以及探头线圈的结构参数对其性能指标的影响,基于麦克斯韦电磁场基本理论,并运用有限元分析方法,在COMSOL仿真软件上模拟了电涡流传感器等效模型,通过仿真实验,分析不同探头线圈结构对其性能指标的影响,仿真结果表明:激励频率对涡流分布影响最大,激励频率的增大,会使被测导体表面的电涡流强度变大,但是探测深度快速减小;涡流探头线圈内径和外径较大且厚度较小时,电涡流传感器的灵敏度越高。研究结果对于音圈快反镜中电涡流传感器的激励频率的选取以及探头线圈结构参数的优化设计提供了重要的参考价值。In order to improve the sensitivity and accuracy of the eddy current sensor,the influence of the excitation frequency and the structural parameters of the probe coil were studied on the performance index of the eddy current sensor.Based on the basic theory of Maxwell electromagnetic field and the finite element analysis method,the equivalent model of the eddy current sensor was simulated on the COMSOL simulation software.The simulation results show that the excitation frequency has the greatest effect on the eddy current distribution.The increase of the excitation frequency increases the eddy current intensity on the surface of the measured conductor,but the detection depth decreases rapidly.When the inner diameter and outer diameter of eddy current probe coil are larger,the thickness is smaller,the sensitivity of eddy current sensor is higher.The research results provide important reference value for the selection of excitation frequency of eddy current sensor in voice coil fast reflection mirror and the optimization design of probe coil structure parameters.

关 键 词：电涡流传感器 探头线圈 有限元仿真 几何参数 灵敏度 

分 类 号：V263.3[航空宇航科学与技术—航空宇航制造工程]