Microscale chemiresistive hydrogen sensors:Current status and recent developments  

作　　者：Lu Li Zilun Wang Ye Chang 

机构地区：[1]State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University,Tianjin 300072,China

出　　处：《Nanotechnology and Precision Engineering》2024年第4期93-116,共24页纳米技术与精密工程(英文)

基　　金：support from the National Key R&D Program of China(Grant No.2018YFE0118700);the National Natural Science Foundation of China(NSFC No.62174119);the 111 Project(Grant No.B07014);the Foundation for Talent Scientists of Nanchang Institute for Micro-technology of Tianjin University.

摘　　要：Hydrogen is known for its efficient combustion,abundant natural availability,and environmentally friendly characteristics.It is recognized as a promising energy source for the future and is already utilized in various industries,including petrochemicals,electronics,food processing,aerospace,and new energy vehicles.However,challenges arise in the storage and use of hydrogen owing to its tendency to leak,its potential for explosion within a specific concentration range of 4%-75%,and itslow ignition energy requirements.Consequently,there is a demand for hydrogen sensors capable of quickly and accurately detecting low levels of hydrogen leaks.Microelectromechanical systems-based chemiresistive hydrogen sensors offer advantages such as low cost,compact size,low energy consumption,and superior sensing performance,making them a major focus of recent research.This article provides a comprehensive overview and comparison of the sensing principles of various hydrogen sensors,including chemiresistive sensors,electrochemical sensors,thermocatalytic sensors,acoustic sensors,and mechanical sensors.Micro-chemiresistive hydrogen sensors exhibit high sensitivity,low cost,and ease of integration,making them highly promising for practical applications.In response to the challenges encountered in practical applications of chemiresistive hydrogen sensors,such as high operating temperatures and high power consumption,this review explores emerging trends in chemiresistive hydrogen sensor technology from the perspectives of novel materials and activation methods.Finally,it discusses the applications and potential further developments of chemiresistive hydrogen sensors.

关 键 词：Hydrogen sensor MEMS Chemiresistive sensor Self-heating sensor Light-activated sensor 

分 类 号：TQ116.2[化学工程—无机化工] TP212[自动化与计算机技术—检测技术与自动化装置]