洁净厌氧烘箱的锁紧机构改造及温度均匀度优化  

Reform of Locking Mechanism of Clean Anaerobic Oven and Temperature Uniformity Optimization

作　　者：苏杭 陈磊 熊伟尉 白杨 施国政[1] SU Hang;CHEN Lei;XIONG Weiwei;BAI Yang;SHI Guozheng(The 55^(th)Research Institute of CETC,Nanjing 210016,China)

机构地区：[1]中国电子科技集团公司第五十五研究所,江苏南京210016

出　　处：《电子工业专用设备》2025年第1期37-40,共4页Equipment for Electronic Products Manufacturing

摘　　要：介绍了洁净厌氧烘箱的运行原理,以及腔体温度分布的测量方法,并应用该方法对烘箱进行热分布实验测试。对影响腔体温度分布的因素展开研究,并通过对设备锁紧机构的升级改造,改善烘箱腔门密封性,实现了对腔体温度均匀度、上下偏差值等关键工艺参数的优化,提升了设备的工艺能力及产能。This paper introduces the operation principle of clean anaerobic oven and the measurement method of chamber temperature distribution,then applies this method to test the temperature uniformity of oven.The factors affecting the temperature distribution of the chamber are studied,and the sealing property of the oven chamber is improved by upgrading the locking mechanism of the equipment,and the key process parameters such as the temperature uniformity,upper deviation and lower deviation of the chamber are optimized,thus improving the process ability and production capacity of the equipment.

关 键 词：设备改造 温度均匀度 热分布实验 烘箱 

分 类 号：TN307[电子电信—物理电子学]