运动台平衡质量气浮导轨设计及制造工艺研究  

Research on the Characteristics of the Balance Mass Air Floatation Guide Rail of a Motion Platform

作　　者：赵宝君 田世伟 赵宏亮 李建辉 范少峰 李超 ZHAO Baojun;TIAN Shiwei;ZHAO Hongliang;LI Jianhui;FAN Shaofeng;LI Chao(The 45^(th)Research Institute of CETC,Beijing 100176,China)

机构地区：[1]中国电子科技集团公司第四十五研究所,北京100176

出　　处：《电子工业专用设备》2025年第1期41-45,共5页Equipment for Electronic Products Manufacturing

摘　　要：运动台平衡质量气浮导轨主要用于运动导向气浮面和平衡质量配重,具有质量大、精度高的特点,加工难度较大;其性能直接影响运动台的运动性能,利用有限元软件ANSYS对气浮导轨进行静力学仿真分析,对气浮导轨的优化设计和加工制造提供理论依据。The balance mass air floating guide rail of the motion stage is mainly used for the air floating surface and balancing the mass balance weight,which has the characteristics of high quality and precision,and is difficult to process.Its performance directly affects the motion performance of the motion stage.The finite element software ANSYS is used to statics simulation analyze the air suspension spindle,providing a theoretical basis for the optimization design and manufacturing of the air floatation guide rail.

关 键 词：平衡质量 静力学 有限元 加工制造 

分 类 号：TH122[机械工程—机械设计及理论]