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作 者:Yaoyao Liao Qingwei Liao Yuxiang Yin Yinghao Li Mingkun Du Hanqing Zhao Lingxia Li Yuying Wang Lei Qin
机构地区:[1]Key Laboratory of Sensors,Beijing Information Science&Technology University,Beijing 100192,China [2]Key Laboratory of Modern Measurement&Control Technology,Ministry of Education,Beijing Information Science&Technology University,Beijing 100192,China [3]School of Microelectronics,Tianjin University,Tianjin 300072,China [4]Nanjing Light Xingjian Biological Technology Co.,Ltd.,Nanjing 210012,China
出 处:《Journal of Advanced Ceramics》2024年第12期1931-1942,共12页先进陶瓷(英文)
基 金:the Beijing Natural Science Foundation(No.L243022);the National Natural Science Foundation of China(No.U2006218);the Project of Construction and Support for High-Level Innovative Teams of Beijing Municipal Institutions(No.BPHR20220124).
摘 要:In energy generation,aerospace,and other related industries,high-temperature acceleration sensing is an essential tool for diagnostic testing,troubleshooting,and quality control.Currently,commercial acceleration sensors have a maximum operating temperature of no more than 550℃.The study of high-temperature piezoelectric ceramics is important for increasing the operating temperature of sensors.In this work,high-temperature Bi_(2)Mo_(x)W_(1−x)O_(6)(BW)piezoelectric ceramics were prepared,and an all-mechanical center compression high-temperature acceleration sensor was designed and fabricated.The results show that when the doping ratio is x=0.001,the ceramic sample has the best performance:the relative density of 92%,the piezoelectric coefficient(d33)of 15 pC·N^(−1),the quality factor(Q_(m))of 1642,the dielectric constant(ε)of 307(1 kHz),and the dielectric loss(tanδ)of 0.33(1 kHz).With increasing B-doped Mo^(6+)content,the Curie temperatures of the ceramics are 975,966,961,and 967℃and the high-temperature annealing temperatures are 975,975,950,and 950°C,respectively.According to tests of temperature performance,the developed BW high-temperature sensor has a good linear response and sensitivity.At room temperature,a BW high-temperature piezoelectric sensor can be used stably within 1 kHz,and the average sensitivity is 3.259 pC·g^(−1).At 800℃,this device can be used in the frequency range of 0.1–1.1 kHz,and the average sensitivity is 3.305 pC·g^(−1);the linearity is greater than 0.99,and the sensitivity deviation is 1.4%.
关 键 词:high-temperature sensing acceleration sensor bismuth tungstate(BW) PIEZOELECTRIC
分 类 号:TQ174.75[化学工程—陶瓷工业] TB33[化学工程—硅酸盐工业]
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