Illumination diversity in multiwavelength extreme ultraviolet ptychography  

作　　者：ANTONIOS PELEKANIDIS FENGLING ZHANG MATTHIAS GOUDER JACOB SEIFERT MENGQI DU KJELD S.E.EIKEMA STEFAN WITTE 

机构地区：[1]Advanced Research Center for Nanolithography,1098 XG Amsterdam,The Netherlands [2]Department of Physics and Astronomy,Vrije Universiteit,1081 HV Amsterdam,The Netherlands

出　　处：《Photonics Research》2024年第12期2757-2771,共15页光子学研究(英文版)

基　　金：Toegepaste en Technische Wetenschappen,NWO(P16-08);European Research Council(ERC)(864016).

摘　　要：With the development of high harmonic generation(HHG),lensless extreme-ultraviolet(XUV)imaging at nanoscale resolution has become possible with table-top systems.Specifically,ptychographic phase retrieval using monochromatic XUV illumination exhibits extraordinary robustness and accuracy to computationally reconstruct the object and the illumination beam profile.In ptychography,using structured illumination has been shown to improve reconstruction robustness and image resolution by enhancing high spatial-frequency diffraction.However,broadband imaging has remained challenging,as the required multiwavelength algorithms become increasingly demanding.One major aspect is the ability to separate the available information into different physically meaningful states,such as different spectral components.Here,we show that introducing spatial diversity between spectral components of an HHG beam can significantly improve the reconstruction quality in multiwavelength XUV ptychography.We quantify the diversity in the polychromatic illumination by analyzing the diffraction patterns using established geometry-and information-theory-based dissimilarity metrics.We experimentally verify the major influence of diversity by comparing ptychography measurements using HHG beams with Gaussian and binary structured profiles as well as with beams carrying wavelength-dependent orbital angular momentum.Our results demonstrate how structured illumination acts in twofold by separating the spectral information in a single diffraction pattern while providing maximized added information with every new scan position.We anticipate our work to be a starting point for high-fidelity polychromatic imaging of next-generation nanostructured devices at XUV and soft-X-ray wavelengths.

关 键 词：ILLUMINATION ULTRAVIOLET EXTREME 

分 类 号：TN23[电子电信—物理电子学]