Additive and subtractive hybrid manufacturing assisted by femtosecond adaptive optics  

作　　者：ERSE JIA CHEN XIE YUE YANG XINYU MA SHIXIAN SUN YANFENG LI XUEQIAN ZHANG MINGLIE HU 

机构地区：[1]Ultrafast Laser Laboratory,School of Precision Instruments and Opto-electronics Engineering,Tianjin University,Tianjin 300072,China [2]Key Laboratory of Opto-electronic Information Science and Technology(Ministry of Education),Tianjin University,Tianjin 300072,China [3]Center for Terahertz Waves,School of Precision Instruments and Opto-electronics Engineering,Tianjin University,Tianjin 300072,China

出　　处：《Photonics Research》2024年第12期2772-2783,共12页光子学研究(英文版)

基　　金：National Natural Science Foundation of China(62275191,61827821,61605142);Tianjin Research Program of Application Foundation and Advanced Technology(17JCJQJC43500);Key Laboratory of Optoelectronic Information Technology,Ministry of Education(2023KFKT006).

摘　　要：Advanced micro–nano devices commonly require precise three-dimensional(3D)fabrication solutions for predesigning and integrating 0D to 3D configurations.The additive–subtractive hybrid manufacturing strategy dominated by femtosecond laser direct writing has become an increasingly interesting technical route for material processing.In this study,a novel approach termed femtosecond adaptive optics-assisted hybrid manufacturing was proposed,which integrates subtractive(femtosecond laser ablation)and additive(two-photon polymerization)fabrication.In this hybrid manufacturing method,the introduction of adaptive optics offers parallel direct writing and wide-area material processing capabilities.To demonstrate the validity of the hybrid approach,on-chip surface plasmon polariton waveguides with strong sub-wavelength field confinement and enhanced functionality were successfully fabricated.In comparison with the terahertz-wave devices fabricated based on the focused ion beam technique,the functional tests in terahertz near-field microscopy show a rival performance fabricated with our hybrid approach.Besides,our cost-effective solution also dramatically reduces the fabricating time of excitation regions by a factor>16.Our work provides a new inspiration in integrated photonics.

关 键 词：OPTICS ADDITIVE integrating 

分 类 号：TN249[电子电信—物理电子学] TH16[机械工程—机械制造及自动化]