分光镜厚度对双臂Tolansky干涉自准直仪测角准确性的影响  

Effect of beam splitter thickness on angle measurement accuracy of dual-arm Tolansky interferometric autocollimator

作　　者：方振远 张宝武[1] 崔建军[2] 张斌[1] 陈恺 许子杰 朱玲 孙怡[1] 罗贤欢 FANG Zhenyuan;ZHANG Baowu;CUI Jianjun;ZHANG Bin;CHEN Kai;XU Zijie;ZHU Ling;SUN Yi;LUO Xianhuan(College of Measurement Testing and Instrumentation,China Jiliang University,Hangzhou 310018,China;National Institute of Metrology,Beijing 100013,China)

机构地区：[1]中国计量大学,计量测试与仪器学院,杭州310018 [2]中国计量科学研究院,北京100013

出　　处：《物理学报》2025年第5期78-86,共9页Acta Physica Sinica

基　　金：国家市场监督管理总局科技计划项目(批准号:2022MK220);国家重点研发计划(批准号:2023YFF0616203)资助的课题.

摘　　要：为了解决Tolansky干涉微小角度测量过程依赖动镜测量臂臂长的问题,提出了一种双臂Tolansky干涉自准直测角方案,针对其中分光镜厚度对测角准确性的影响,利用几何光学的单折射球面公式和过渡公式分析了分光镜厚度影响下的虚拟点光源位置,建立了包含分光镜厚度和折射率的圆心偏转量与偏转角之间的关系,通过虚拟仿真和实体实验相结合的方式详细考察了分光镜厚度对测角准确性的影响.结果显示,分光镜厚度不同会影响初始圆心的位置;随着分光镜厚度的增大,不同角度下,仿真测量结果与含厚度因素关系式理论值的相对偏差在±0.5%以内;在同一角度下,所建立的含厚度因素关系式与不含厚度因素关系式的差值逐渐增大.在1 mm分光镜的厚度下,以已标定自准直仪所测导轨数据为准,所建立的含厚度因素关系式与不含厚度因素关系式的相对误差仅为0.22%.本文结果为这种新型自准直仪的深度研究和开发提供了重要的指导.In order to solve the problem that the measurement arm length needs to be obtained in real time when calculating the measurement angle in the process of Tolansky interference small angle measurement,a dual-arm Tolansky interference autocollimation angle measurement scheme is proposed,which not only maintains the function of Tolansky interference,but also integrates the principle of optical leverage.In the simulation study,it is found that the splitter with thickness in the scheme will lead to the lateral offset of the optical axis of the emitted light,which will change the position of the virtual point light source,and finally change the position of the center of the interference circle on the detector.In this work,in order to reduce the influence of the thickness of the beam splitter on the angle measurement accuracy of the angle measurement scheme,the optical path structure of the angle measurement scheme is redrawn,and the relationship between the center offset of the interference ring and the deflection angle,which contains the thickness factor and can accurately describe the optical path,is deduced.Therefore,the corresponding method is adopted as follows.Firstly,the measurement optical path of the splitter with a thickness factor is redrawn,the splitter is partially enlarged,and the original beam is replaced with the center line of the laser beam to draw the optical path.Then,the position of the virtual point light source under the influence of the thickness of the splitter is analyzed by using the single refraction spherical formula and the transition formula of geometric optics,and the relationship between the offset of the interference center and the deflection angle with the thickness of the splitter is established.Secondly,the coordinate information of the center of the interference ring under different thickness parameters of the splitter is obtained by using the virtual simulation experiment,which proves the correctness of the theoretical analysis.Then,simulation experiments such as simulation measure

关 键 词：Tolansky 干涉 自准直仪 同心圆环 微小角度 

分 类 号：G63[文化科学—教育学]