等离子体处理构建梯度分布氧空位提升三氧化钨电致变色性能  

Improving electrochromic properties of tungsten trioxide by constructing gradient distribution oxygen vacancies through plasma treatment

作　　者：江以航 曹俸华 栗浩淼 聂永杰 李国倡 魏艳慧 鲁广昊[1,4] 李盛涛 朱远惟[1] JIANG Yihang;CAO Fenghua;LI Haomiao;NIE Yongjie;LI Guochang;WEI Yanhui;LU Guanghao;LI Shengtao;ZHU Yuanwei(State Key Laboratory of Electrical Insulation and Power Equipment,Xi’an Jiaotong University,Xi’an 710049,China;Electric Power Research Institute,Yunnan Power Gird Co.,Ltd.,Kunming 650217,China;College of Automation and Electronic Engineering,Qingdao University of Science and Technology,Qingdao 266000,China;Frontier Institute of Science and Technology,Xi’an Jiaotong University,Xi’an 710054,China)

机构地区：[1]西安交通大学,电工材料电气绝缘全国重点实验室,西安710049 [2]云南电网有限责任公司电力科学研究院,昆明650217 [3]青岛科技大学自动化与电子工程学院,青岛266000 [4]西安交通大学前沿科学技术研究院,西安710054

出　　处：《物理学报》2025年第5期243-254,共12页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:52477028);高分子物理与化学国家重点实验室开放基金(批准号:PPCL2023-13);电工材料电气绝缘全国重点实验室青年基金(批准号:EIPE23407);中央高校基本科研业务费(批准号:sxzy012023180)资助的课题.

摘　　要：三氧化钨(WO_(3))是一种典型的电致变色材料,因其出色的光-电特性成为科学研究和工程应用的热点材料.WO3的电致变色性能受其氧空位浓度和分布的影响,进而调控其变色效率和稳定性.现有调控方法多为以退火为代表的高温处理,无法维持薄膜的低结晶度,因而导致循环性能下降.本研究采用等离子体处理技术调控WO_(3)薄膜氧空位的生成和分布,采用X射线衍射、扫描电子显微镜、光电测试和循环伏安法等对处理后薄膜进行表征,确定其微观结构和氧空位水平,获得氧空位对电致变色性能的调控规律,并与氩气环境退火所得薄膜进行对比.结果表明,等离子体处理能够显著地提高WO3薄膜的表面氧空位浓度,并在薄膜深度方向形成梯度氧空位分布.与原始薄膜和氩气退火制备的薄膜相比,等离子体处理优化后的氧空位分布显著地增强了WO_(3)薄膜的电子注入和抽出能力,薄膜光学调制范围提升至85%,且具有更快的变色响应速度和更好的循环稳定性.In recent years,electrochromic materials have been extensively utilized in smart windows,displays,and dimmable devices.WO_(3),as a typical electrochromic material has received significant attention.Existing researches indicate that the concentration and distribution of oxygen vacancies in WO_(3) are both important in determining electrochromic effect.However,it has been reported that traditional preparation methods such as annealing can significantly reduce the ability to modulate the crystallinity and optical performance.Hence,proposing a novel approach to enhance the electrochromic properties of WO_(3) films holds important research significance and application prospects.In this work,the electrochromic properties of WO_(3) thin films are enhanced by increasing the oxygen vacancy concentration and forming its gradient distribution on the surface through plasma treatment.Firstly,the oxygen vacancy concentration and distribution of the film are optimized by regulating the power and duration of the plasma treatment.Secondly,the structure and optical properties of the plasma treated WO_(3) films are analyzed using X-ray diffraction(XRD),scanning electron microscopy(SEM),and UV-Vis spectroscopy.Finally,the stability and response speed of each film during the electrochromic cycle are evaluated via electrochemical tests.Through plasma treatment,the concentrations of oxygen vacancies on the surfaces of WO_(3) films are all significantly increased,and a gradient distribution is formed,which is conducive to enhancing the ability to inject and extract electrons.The treated WO_(3) films demonstrate better electrochemical stability and chromic stability during the electrochromic cycle,and their transparencies and electrochromic response speeds are also significantly enhanced.Additionally,by increasing the concentration of oxygen vacancies through plasma treatment,the band gap of the film decreases and the electrical conductivity increases,which further validates the effectiveness of modulating concentration of oxygen vacanci

关 键 词：WO_(3) 氧空位 等离子体 电致变色 

分 类 号：TB3[一般工业技术—材料科学与工程]