基于压力梯度维持需求的暖通施工技术探究  

Investigation of HVAC Construction Technology Based on Pressure Gradient Maintenance Requirements

作　　者：高坚 Gao Jian(Shanghai Quantum Science Research Center,Shanghai 201315,China)

机构地区：[1]上海量子科学研究中心,上海201315

出　　处：《建筑与装饰》2025年第4期182-184,共3页Construction & Decoration

摘　　要：近几年,集成电路行业无论是新建,或是扩建的需求都在日益增加,产品迭代对应产线改造也是层出不穷,在此背景下产生的各种暖通问题频出。集成电路的各道生产工艺对环境要求极高,环境参数的稳定性直接影响产品优良率。本文以上海集成电路装备材料产业创新中心有限公司产能扩充与技术改造项目为例,以集成电路生产厂房气化分配间的运行环境为典型,从施工技术方面入手,对“环境的压力梯度稳定维持”这一问题进行论述,希望可以为有关项目的实施提供借鉴。In recent years,the demand for new construction and expansion in the integrated circuit industry has been increasing continuously.The iteration of products corresponds to the constant transformation of production lines,leading to a variety of HVAC issues.The various production processes of integrated circuits have extremely high environmental requirements,and the stability of environmental parameters directly affects the product yield.Taking the capacity expansion and technical transformation project of Shanghai Integrated Circuit Equipment and Material Industry Innovation Center Co.,Ltd.as an example,and focusing on the operating environment of the gasification distribution room in the integrated circuit production plant,this paper discusses the issue of“environmental pressure gradient stability maintenance”from the perspective of construction technology,hoping to provide references for the implementation of relevant projects.

关 键 词：半导体 生产厂房 暖通安装施工 压力梯度 

分 类 号：F42[经济管理—产业经济]