高次碳化硅非球面次镜CGH补偿面形检测技术  

CGH compensation surface testing technology for high-order SiC aspherical secondary mirror

作　　者：唐卓睿 毛朝斌 张瀛怀 冯畅 丘敏艳 胡承 张鑫 TANG Zhuorui;MAO Chaobin;ZHANG Yinghuai;FENG Chang;QIU Minyan;HU Cheng;ZHANG Xin(Ji Hua Laboratory,Foshan 528253,China)

机构地区：[1]季华实验室,广东佛山528253

出　　处：《红外与激光工程》2025年第2期94-100,共7页Infrared and Laser Engineering

基　　金：广东省基础与应用基础研究基金项目(2023B1515120059)。

摘　　要：次镜的全口径面形测量是干涉检测中的难点问题,为了实现同轴高次碳化硅非球面次镜的全口径面形检测,提出了一种基于CGH的零位补偿测量模型。利用该模型对90 mm口径的高次碳化硅非球面次镜进行了零位补偿设计。设计中,为了降低次镜的调整测试难度,采用平面波出射干涉仪、CGH及待测同轴高次碳化硅非球面次镜进行光路搭建设计。从设计分析可以得出,基于文中的次镜补偿设计方法,其补偿设计的理论设计精度RMS值为0 nm,验证了该设计方法的精度与准确性。同时,对该次镜进行了干涉检测及误差分析,其全口径面形检测结果 RMS值达到0.015λ(λ=632.8 nm),标定CGH透射波像差后其全口径面形检测结果 RMS值为0.016λ(λ=632.8 nm),进一步验证了文中方法的可靠性。Objective The full-aperture surface measurement of the secondary mirror was always a difficult problem in interferometric testing.In order to realize the full-aperture testing of coaxial high-order SiC aspherical mirror,a null compensation measurement model based on CGH was proposed.With this model,the null compensation testing for a 90 mm aperture high-order SiC aspherical mirror was designed.By calibrating the influence of the transmission wave aberration of CGH in the test results and removing it in the secondary mirror test results,the accurate CGH null compensation testing of the high-order SiC aspherical secondary mirror could be effectively realized.This method could provide technical support for the high-precision manufacturing of aspherical secondary mirror in aerospace.Methods In order to realize the CGH compensation design of the high-order SiC aspherical secondary mirror,combined with the engineering example,the CGH null compensation design of the interferometer plane wave incident was carried out on a high-order SiC aspheric secondary mirror with an aperture of 90 mm,a vertex curvature radius of 422.6 mm,a quadratic term coefficient of 9.1,an aspheric high-order term A4 coefficient of 3.92,and an A6 coefficient of 4.72.The design of the optical path was shown in Fig.2.In order to accurately realize the high-precision alignment of the interferometer,CGH and the SiC aspherical secondary mirror to be tested,the interferometer and CGH alignment area on the CGH were designed at the same time,as shown in the blue area in Fig.2.It formed dry fringes with the reflected light of the standard lens in the interferometer through reflection diffraction.By adjusting the position of the CGH,the fringes became zero fringes.At this time,the interferometer and the CGH were strictly aligned. The green area in Fig.2 was the aspherical secondary mirrortesting area, which finally completed the surface map measurement of the convex aspherical mirror.Results and Discussions From the design analysis of this paper, it could b

关 键 词：干涉检测 零位补偿 计算全息 非球面次镜 

分 类 号：O439[机械工程—光学工程] O436.1[理学—光学]