一种双环形凹面镜结构的光纤F-P腔位移传感器设计  

Fiber optic Fabry Perot cavity displacement sensor based on dual ring concave mirror structure

作　　者：谭心[1,2] 李自鹏 杨桥 张硕 贺占清 王健 祁辉 TAN Xin;LI Zipeng;YANG Qiao;ZHANG Shuo;HE Zhanqing;WANG Jian;QI Hui(School of Mechanical Engineering,Inner Mongolia University of Science and Technology,Baotou Inner Mongolia 014010,China;Key Laboratory of Micro-Nano Structure Design and Manufacturing Technology,Inner Mongolia University of Science and Technology,Baotou Inner Mongolia 014010,China)

机构地区：[1]内蒙古科技大学机械工程学院,包头内蒙古014010 [2]内蒙古科技大学微纳结构设计与制造技术重点实验室,包头内蒙古014010

出　　处：《激光杂志》2025年第2期29-33,共5页Laser Journal

基　　金：国家自然科学基金项目(No.62365015);内蒙古自治区自然科学基金项目(No.2023MS05047)。

摘　　要：建筑安全隐患严重威胁人身及财产安全。为了切实保障人身财产的安全,文中提出了一种应用于安全检测的双环形凹面镜结构的光纤法布里-珀罗(F-P)腔位移传感器。首先使用氢氟酸进行化学蚀刻法得到凹槽结构,然后通过掩膜法使用光刻胶在光纤纤芯位置制作波导,将制作好的光纤结构使用磁控溅射法镀制银膜,最后将波导结构洗去得到双环形凹面镜结构,两根具备相同结构的光纤组成Fabry-Perot腔结构。研究结果表明,双环形凹面镜结构能够很好地实现提高传感器灵敏度和线性度的目的,设计的传感器在0~30μm间灵敏度达到105.535/μm,线性度超过0.999。The severe safety hazards in buildings pose significant threats to personal and property safety.To effectively protect personal and property safety,the article proposes an optical fiber FP cavity displacement sensor with a dual-ring concave mirror structure for safety inspection.First,hydrofluoric acid is used for chemical etching to obtain a groove structure.Then,photoresist is used to create waveguides at the core position of the fiber.The fabricated fiber structure is then coated with a silver film using magnetron sputtering.Finally,the waveguide structure is washed away to obtain a double-ring concave mirror structure.Two fibers with the same structure form a Fabry-Perot cavity structure.The research results indicate that the dual-ring concave mirror structure can effectively enhance the sensitivity and linearity of the sensor.The designed sensor achieves a sensitivity of 105.535/μm within a range of 0-30 micrometers,

关 键 词：化学腐蚀 氢氟酸 Fabry-Perot腔 位移 凹面镜 安全检测 

分 类 号：O439[机械工程—光学工程]