空腔型薄膜体声波滤波器的关键技术进展  

Progress on Key Technologies of Cavity-structured Thin Film Bulk Acoustic Wave Filter

作　　者：陶桂龙 支国伟 罗添友 欧阳佩东 衣新燕 李国强[1,2,3] TAO Guiong;ZHI Guowei;LUO Tianyou;OUYANG Peidong;YI Xinyan;LI Guoqiang(School of Integrated Circuits,South China University of Technology,Guangzhou 511442,China;State Key Laboratory of Luminescent Materials and Devices,South China University of Technology,Guangzhou 510640,China;Guangzhou FLCT Communication Technology Co.,Ltd.,Guangzhou 510700,China)

机构地区：[1]华南理工大学集成电路学院,广州511442 [2]华南理工大学发光材料与器件国家重点实验室,广州510640 [3]广州市艾佛光通科技有限公司,广州510700

出　　处：《无机材料学报》2025年第2期128-144,共17页Journal of Inorganic Materials

基　　金：国家重点研发计划(2022YFB3604500,2022YFB3604501)。

摘　　要：随着通信技术升级以及5G通信应用的驱动,各种智能设备所需的滤波器数量激增,促进了滤波器市场的繁荣,但对其性能要求也越来越高,例如大带宽、高频率、高功率容量、微型化、集成化以及低成本等指标是学术界与产业界重点关注的方向,而基于薄膜体声波谐振器(Thin Film Bulk Acoustic Resonator,FBAR)技术的FBAR滤波器已成为最有前景的滤波器之一。另外,当前空腔型FBAR滤波器已取得了一定的商业成功,但是仍面临性能不足、工艺复杂、成本略高、技术受限等困境。为此,本文试图从器件理论研究与结构优化、高性能压电材料制备与优化、新型工艺开发及技术融合三方面对FBAR滤波器的相关问题与关键技术进行综述,旨在为该研究领域的学者梳理FBAR滤波器技术进阶与迭代的脉络,以期为未来研究的路径与方向提供若干启发性思考。With upgrading of communication technology and driving of 5G communication applications,the explosive number of filters required by various smart devices promoted prosperity of the filter market.However,the demanded performance also becomes increasingly stringent,including broad bandwidth,high frequency,high power capacity,miniaturization,integration,and low cost,in both academia and industry.To meet these strict requirements,the thin film bulk acoustic resonator(FBAR)filters have emerged as one of the most promising types of filters with commercial success.But currently they are still facing difficulties such as insufficient performance,complex fabrication process,relatively higher cost,and technological constraints.This paper reviews the relevant issues and key technologies in FBAR filters in three aspects:theoretical research on devices and structural optimization,preparation and optimization of high-performance piezoelectric materials,and development of novel processes and technological integration.The purpose of this paper is to delineate the trajectory of technological advancements and iterations in FBAR filters for scholars in the research field,with the expectation of providing several considerations for future research directions and pathways.

关 键 词：FBAR滤波器 理论研究 AlN压电薄膜 技术融合 综述 

分 类 号：TN713[电子电信—电路与系统]